Search Results - "Neklyudova, P. A."

Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field by Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.

“…A plasma reactor that contains vacuum–arc and magnetron sputtering sources and radio-frequency discharge that generates high-density plasma in the presence of…”
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Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System by Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya

“…The following must be added at the end of Acknowledgments: The study by JSC Research Institute of Precision Machine Manufacturing was supported by the Ministry…”
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Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system by Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya

“…Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are…”
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Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system by Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.

“…The results of the experimental investigation into parameters of the helicon discharge plasma in a model of high-frequency hybrid plasma system equipped with a…”
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Erratum to: “Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system” by Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.

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