Search Results - "Nekludova, P.A."

A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area by Mumlyakov, A.M., Pershina, E.A., Bondareva, Ju.V., Nekludova, P.A., Shibalova, A.A., Shibalov, M.V., Anufriev, Yu.V., Tagachenkov, A.M., Tarkhov, M.A.

“…In this study, n-diamond–carbon nanowalls hybrid structure was synthesized on a 4-inch diameter silicon wafer by RF-PECVD technique (type CCP). A comprehensive…”
Get full text

Mutual influence of the channels in a combined discharge based on the RF inductive and DC discharges by Kralkina, E.A., Nekludova, P.A., Nikonov, A.M., Vavilin, K.V., Zadiriev, I.I.

“…The present work aims to analyze the mutual influence of channels in a combined discharge based on the RF inductive and DC discharges and to find the…”
Get full text

Fabrication and characterization of quasi-three-dimensional capacitor structure based on carbon nanowalls by Mumlyakov, A.M., Shibalov, M.V., Timofeeva, E.R., Trofimov, I.V., Porokhov, N.V., Evlashin, S.A., Nekludova, P.A., Pershina, E.A., Anufriev, Yu.V., Tagachenkov, A.M., Zenova, E.V., Tarkhov, M.A.

“…Vertically oriented graphene structures have a high specific surface area which makes them potential candidates for realization of various devices. On their…”
Get full text

Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure by Mumlyakov, A.M., Shibalov, M.V., Trofimov, I.V., Verkholetov, M.G., Orlov, A.P., Diudbin, G.D., Evlashin, S.A., Nekludova, P.A., Anufriev, Yu.V., Tagachenkov, A.M., Zenova, E.V., Tarkhov, M.A.

“…This study presents dielectric properties investigation of hafnium oxide (HfOx), aluminum oxide (AlOx) and tantalum oxide (TaOx) thin films and HfAlTaOx…”
Get full text