Search Results - "Nassiet, Thomas"
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The Impact of Surface Voltage on Photoluminescence Response for the Detection of Copper and Iron Contamination in Silicon
Published in Physica status solidi. A, Applications and materials science (01-05-2022)“…Herein, silicon substrates intentionally contaminated by iron and copper are analyzed by an innovative technique based on photoluminescence (PL) measurement,…”
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Journal Article -
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Investigation of Photoluminescence Voltage PL-V Measurement: Correlation to Capacitance Voltage C-V for Si/Dielectric Interface Characterization
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01-08-2020)“…We present an innovative approach of bias dependent photoluminescence characterization (PL-V) involving industrial Room Temperature Photoluminescence (RTPL)…”
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Conference Proceeding -
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Characterization of Heated Ion Implantation for non Amorphizing Conditions and Correlation with Kinetic Monte Carlo Simulations
Published in 2018 22nd International Conference on Ion Implantation Technology (IIT) (01-09-2018)“…In this work, heated implantation impact on defect generation is observed for non-amorphizing conditions and specific anneal. Photoluminescence imaging method…”
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Conference Proceeding