Search Results - "NURMELA, A"

Reactive sputter deposition and properties of TaxN thin films by RIEKKINEN, T, MOLARIUS, J, LAURILA, T, NURMELA, A, SUNI, I, KIVILAHTI, J. K

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Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators by Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M., van Dijken, S.

“…The growth of high-quality AlN films has been studied by reactive sputtering onto Mo electrodes with Ni, Ti, and TiW seed layers and subsequent integration…”
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Alpha–proton elastic scattering cross sections for ERDA in the resonance region by Pusa, P, Rauhala, E, Gurbich, A, Nurmela, A

“…We have investigated alpha–proton elastic scattering for He-ERDA. The broad maximum of the elastic scattering resonance around E He=8.8 MeV is most important…”
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Stress control of sputter-deposited Mo-N films for micromechanical applications by KATTELUS, H, KOSKENALA, J, NURMELA, A, NISKANEN, A

“…Sputter-deposited metallic thin films are attractive materials for micromechanics but they suffer from large stress variations within the batch or even a…”
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Ion beam studies of hydrogen implanted Si wafers by Nurmela, A., Henttinen, K., Suni, T., Tolkki, A., Suni, I.

“…We have studied silicon-on-insulator (SOI) materials with two different ion beam analysis methods. The SOI samples were implanted with boron and hydrogen ions…”
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Influence of hydrogen dose and boron doping on the ion cutting of Si by Nurmela, A., Henttinen, K., Suni, T., Suni, I.

“…Ion beam techniques were used to study silicon‐on‐insulator (SOI) structures manufactured by the ion cutting process. Silicon wafers and epitaxial Si layers…”
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Cold ion-cutting of hydrogen implanted Si by Henttinen, K., Suni, T., Nurmela, A., Suni, I., Lau, S.S., Höchbauer, T., Nastasi, M., Airaksinen, V.-M.

“…The strength of the H-implanted layer has been measured in 〈1 0 0〉 , 〈1 1 1〉 and 〈1 1 0〉 oriented Si wafers using the crack opening method. The required…”
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RBS and ERD cross-sections and optical model parameters for the analysis of lithium, boron and nickel by Nurmela, A, Pusa, P, Rauhala, E, Räisänen, J

“…Elastic scattering cross-sections for RBS analysis of nickel by 7 Li and 11 B ion backscattering near the Coulomb barrier have been determined. The lithium ion…”
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Transfer of thin Si layers by cold and thermal ion cutting by HENTTINEN, K, SUNI, T, NURMELA, A, LUOTO, H. V. A, SUNI, I, AIRAKSINEN, V.-M, KARIRINNE, S, CAI, M, LAU, S. S

“…We have used the crack-opening method to study the mechanical exfoliation behavior in hydrogen-implanted and bonded Cz Si. We found that the crystal…”
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Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AIN resonators by RIEKKINEN, T, NURMELA, A, MOLARIUS, J, PENSALA, T, KOSTAMO, P, YLILAMMI, M, VAN DIJKEN, S

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ZnO for thin film BAW devices by Molarius, J., Nurmela, A., Pensala, T., Ylilammi, M., Dommann, A.

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Elastic scattering cross sections for 6Li and 7Li scattering by aluminum, silicon and titanium below 12 MeV at angles of 140 ∘ and 170 by Nurmela, A, Rauhala, E, Räisänen, J

“…Elastic scattering cross sections for 6Li and 7Li scattering by natural aluminum, silicon and titanium have been measured in the energy range of 4–11 MeV…”
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Reactive sputter deposition and properties of Ta sub(x)N thin films by Molarius, J, Laurila, T, Nurmela, A, Suni, I, Kivilahti, J K, Riekkinen, Tommi

“…The aim of this work was to evaluate tantalum nitride thin films fabricated using reactive sputtering with adjusted deposition parameters. Thin Ta sub(x)N…”
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Elastic scattering cross sections for the analysis of helium by 1H backscattering and hydrogen by 4He ERD by Nurmela, A., Räisänen, J., Rauhala, E.

“…Elastic scattering cross sections for the analysis of helium by proton backscattering have been determined in the energy region 1.6–2.7 MeV. The measurements…”
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Reactive sputter deposition and properties of Ta xN thin films by Riekkinen, T, Molarius, J, Laurila, T, Nurmela, A, Suni, I, Kivilahti, J.K

“…The aim of this work was to evaluate tantalum nitride thin films fabricated using reactive sputtering with adjusted deposition parameters. Thin Ta x N films…”
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Transfer of thin Si layers by cold and thermal ion cutting by Henttinen, K, Suni, T, Nurmela, A, Luoto, H V A, Suni, I, Airaksinen, V.-M., Karirinne, S, Cai, M, Lau, S S

“…We have used the crack-opening method to study the mechanical exfoliation behavior in hydrogen-implanted and bonded Cz Si. We found that the crystal…”
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Nonlinear effects in solidly-mounted ZnO BAW resonators by Nurmela, A., Salminen, H., Mattila, T., Ylilammi, M.

“…The mechanical nonlinearity due to high power level in zinc oxide thin film bulk acoustic wave resonators has been studied in this work. The nonlinear behavior…”
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Piezoelectrically transduced single-crystal-silicon plate resonators by Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A., Holmgren, O., Kokkonen, K.

“…We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk…”
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P2G-3 Piezotransduced Single-Crystal Silicon BAW Resonators by Jaakkola, A., Rosenberg, P., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A.

“…We report on the design, fabrication and measurement of 13-MHz piezoelectrically actuated single-crystal silicon beam resonators operating in the first…”
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Piezoelectrically actuated micromechanical BAW resonators by Rosenberg, P., Jaakkola, A., Dekker, J., Nurmela, A., Pensala, T., Asmala, S., Riekkinen, T., Mattila, T., Alastalo, A.

“…We report on piezoelectrically actuated 13 MHz silicon beam resonators operating in the fundamental length extensional BAW mode. The resonance is evoked using…”
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