Search Results - "Mulgrew, P. P."
-
1
Defect repair for soft x‐ray projection lithography masks
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1992)“…The most promising option for masks intended for use in soft x‐ray projection lithography (SXPL) at λ=13 nm is a reflective mask which uses a Mo/Si multilayer…”
Get full text
Conference Proceeding -
2
Search for an economic order
Published in Health and social service journal (21-10-1982)Get more information
Journal Article -
3
Characterization of near‐field holography grating masks for optoelectronics fabricated by electron beam lithography
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1992)“…Direct write e‐beam lithography and reactive ion etching was used to fabricate square‐wave gratings in quartz substrates which serve as pure phase masks in the…”
Get full text
Conference Proceeding Journal Article -
4
High-performance deep-submicrometer Si MOSFETs using vertical doping engineering
Published in IEEE transactions on electron devices (01-11-1992)“…Summary form only given. Vertical doping engineering was used to implement deep-submicrometer Si MOS devices with excellent room-temperature turn-off and…”
Get full text
Journal Article -
5
Characterization of AZ PN114 resist for high resolution using electron‐beam and soft‐x‐ray projection lithographies
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1992)“…We report on resolution experiments with the negative chemically amplified resist AZ PN114. Using soft‐x‐ray projection lithography at λ=14 nm, we imaged…”
Get full text
Conference Proceeding -
6
Pharmacy and the kidney patient
Published in The Health service journal (17-08-1989)Get more information
Journal Article -
7
Addison's disease due to metastatic carcinoma
Published in Southern medical journal (Birmingham, Ala.) (01-06-1984)Get more information
Journal Article -
8
89-GHzfT room-temperature silicon MOSFET's
Published in IEEE electron device letters (01-05-1992)Get full text
Journal Article -
9
89-GHz f/sub T/ room-temperature silicon MOSFETs
Published in IEEE electron device letters (01-05-1992)“…The authors report the implementation of deep-submicrometer Si MOSFETs that at room temperature have a unity-current-gain cutoff frequency (f/sub T/) of 89…”
Get full text
Journal Article -
10
Effects of processing pressure on device damage in RF biased ECR CVD
Published in 1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) (1999)“…Charging effects were investigated in an electron cyclotron resonance (ECR) plasma-enhanced CVD system using a variety of techniques including CHARM-2 wafers…”
Get full text
Conference Proceeding -
11
89-GHz < e1 > f < /e1 > (T) room-temperature silicon MOSFETs
Published in IEEE electron device letters (01-05-1992)“…The authors report the implementation of deep-submicrometer Si MOSFETs that at room temperature have a unity-current-gain cutoff frequency ( < e1 > f < /e1 >…”
Get full text
Journal Article -
12
High performance 0.1- mu m room temperature Si MOSFETs
Published in 1992 Symposium on VLSI Technology Digest of Technical Papers (1992)“…The design and implementation of 0.15- mu m-channel N-MOSFETs with very high current drive and good short channel behavior at room temperature are discussed…”
Get full text
Conference Proceeding -
13
High Performance Deep Submicron Si MOSFETS Using Vertical Doping Engineering
Published in 50th Annual Device Research Conference (1992)Get full text
Conference Proceeding -
14
An Alternative Method for Teaching a Course in Group Methods
Published in Counselor Education and Supervision (1974)“…Briefly describes a point system used in a course on group methods to provide greater flexibility for students. (CJ)…”
Get more information
Journal Article -
15