Search Results - "Moreira, Eurico E."
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1
Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2020)“…This paper reports a MEMS magnetometer with geometrical improvements to increase the displacement resulting from Lorentz forces. It relies on lever-like…”
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Conference Proceeding -
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Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer
Published in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01-03-2020)“…Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their…”
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Conference Proceeding -
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Small Size And Highly Sensitive Differential MEMS Accelerometer Based On Double-Ended Tuning Fork Resonators
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…Here, a frequency modulated MEMS accelerometer encapsulated in vacuum is presented. The small size (0.25 mm 2 ) and the capability of encapsulation at low…”
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Conference Proceeding -
4
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…A very high-resolution SOI (silicon-on-insulator) MEMS (Micro-Electro-Mechanical Systems) accelerometer for geodetic space grade applications using pull-in…”
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Conference Proceeding -
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Novel magnetic readout for hybrid spintronic MEMS devices
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01-06-2017)“…This digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses…”
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Conference Proceeding