Search Results - "Montméat, P."

Temporary polymer bonding for the manufacturing of thin wafers: An innovative low temperature process by Montméat, P., Bally, L., Dechamp, J., Enot, T., Fournel, F.

“…The study deals with the handling of thin wafers in 3D integration. It concerns the fabrication of 300 mm wafers in industrial tools. Usually, the…”
Get full text

Impact of the temperature process on the morphology of 3D temporary bonded wafers: Quantification and reducing of the effect by Montméat, P., Le Cocq, M., Enot, T., Zussy, M., Fournel, F.

“…300 mm diameter thinned-down wafers are manufactured using temporary adhesive bonding. A thermoplastic adhesive and a silicon carrier are used to fabricate…”
Get full text

Development and adhesion characterization of a silicon wafer for temporary bonding by Montméat, P., Enot, T., Enyedi, G., Pellat, M., Thooris, J., Fournel, F.

“…The development of a silicon temporary carrier for thin wafer handling for 3D applications was investigated. Process selection and optimization ended up with a…”
Get full text

Study of a silicon/glass bonded structure with a UV-curable adhesive for temporary bonding applications by Montméat, P., Enot, T., De Marco Dutra, M., Pellat, M., Fournel, F.

“…This paper concerns the study of a temporary bonding process: 3MTM Wafer Support System. This process is dedicated to the handling of thin silicon wafers with…”
Get full text

Polymer bonding temperature impact on bonded stack morphology and adherence energy by Montméat, P., Enot, T., Louro De Oliveira, G., Fournel, F.

“…This paper deals with the effect of the silicon bonding temperature with thermoplastic adhesive. The bonding temperature exhibits a significant effect on the…”
Get full text

Transfer of an ultrathin single-crystal silicon film from a silicon-on-insulator to a polymer by Michaud, L.G., Azrak, E., Castan, C., Fournel, F., Rieutord, F., Tardif, S., Montméat, P.

“…This study reports the manufacturing of silicon-on-polymer (SOP). It describes the transfer of a 200 mm diameter silicon thin film from a silicon-on-insulator…”
Get full text

Origin of the TTV of thin films obtained by temporary bonding ZoneBond® technology by Montméat, P., Enot, T., Pellat, M., Fournel, F., Bally, L., Baud, L., Dechamp, J., Eleouet, R., Vignoud, L., Zussy, M.

“…This paper deals with the improvement of the TTV values (Total Thickness Variation) of 300 mm silicon wafers thinned down at 100 μm using the ZoneBond ®…”
Get full text

Application of temporary adherence to improve the manufacturing of 3D thin silicon wafers by Abadie, K., Montméat, P., Enot, T., Fournel, F., Wimplinger, M.

“…The presented work concerns the manufacturing of very thin silicon wafers for a 3D Integrated Circuit industrial purpose. One of the key parameters of the 3D…”
Get full text

Study of calixarenes thin films as chemical sensors for the detection of explosives by Montmeat, P., Veignal, F., Methivier, C., Pradier, C.M., Hairault, L.

“…•New type of sensing surface, very sensitive to explosives.•Special experimental setup to enable the in situ chemical characterisation of the sensor…”
Get full text

Detection of Explosives Vapors with a Portable Detector Based on Quartz-Crystal Microbalance by Parret, F., Montmeat, P., Prene, P.

“…This paper presents the development of a portable gas sensor device prototype able to detect explosives vapors as 2,4 dinitrotoluene (DNT). This detector is…”
Get full text

A simple thermodynamic approach to predict responses from polymer-coated quartz crystal microbalance sensors exposed to organic vapors by Palmas, P., Klingenfus, J., Vedeau, B., Girard, E., Montmeat, P., Hairault, L., Pradier, C.M., Méthivier, C.

“…As of lately, the demand for developing artificial sensors with improved capabilities for the detection of explosives, toxics or drugs has increased. Ideally,…”
Get full text

Application of membranes and filtering films for gas sensors improvements by Pijolat, C., Viricelle, J.P., Tournier, G., Montmeat, P.

“…It is possible to improve the performances of gas sensors using filtering films deposited above the sensing material. This paper is a review of several recent…”
Get full text

Ultra trace detection of explosives in air: Development of a portable fluorescent detector by Caron, Thomas, Guillemot, Marianne, Montméat, Pierre, Veignal, Florian, Perraut, François, Prené, Philippe, Serein-Spirau, Françoise

“…This paper describes a system for the detection of nitroaromatic explosives consisting of a portable detector based on a specific fluorescent material. The…”
Get full text

Metalloporphyrins as sensing material for quartz-crystal microbalance nitroaromatics sensors by Montmeat, P., Madonia, S., Pasquinet, E., Hairault, L., Gros, C.P., Barbe, J.-M., Guilard, R.

“…Five octaethylporphyrins (OEP) and tetraphenylporphyrins (TPP): (OEP)InCl, (OEP)MnCl, (OEP)GaCl, (TPP)Pd, and (TPP)RhI have been deposited as sensitive coating…”
Get full text

Generation of energetic compounds for calibration of explosives vapor detectors by Frenois, C., Caron, T., Bouhadid, M., Veignal, F., Eloy, N., Montmeat, P., Barthet, C., Pasquinet, E., Hairault, L.

“…The use of explosive-detection systems has increased worldwide for preventing terrorist activities. Because of the variety of explosives materials available…”
Get full text

Model of the thickness effect of SnO2 thick film on the detection properties by Montmeat, P., Lalauze, R., Viricelle, J.-P., Tournier, G., Pijolat, C.

“…The variations of the electrical response of SnO2 thick film sensors (10–80μm) prepared by screen-printing technology versus their thickness depend on the…”
Get full text

Portable chemical gas sensor prototype for nitroaromatic compounds detection by Thery-Merland, F., Montmeat, P., Pasquinet, E., Hairault, L.

“…This paper presents the conception and the development of portable gas sensor prototypes for nitroaromatic compounds detection. It is based on quartz crystal…”
Get full text

Physico-chemical contribution of gold metallic particles to the action of oxygen on tin dioxide sensors by Montmeat, Pierre, Marchand, Jean-Claude, Lalauze, René, Viricelle, Jean-Paul, Tournier, Guy, Pijolat, Christophe

“…The role of a metal (gold) on the electrical response on tin oxide sensor was investigated thanks to the development of a particular test bench: it allows to…”
Get full text

The influence of a platinum membrane on the sensing properties of a tin dioxide thin film by Montmeat, Pierre, Pijolat, Christophe, Tournier, Guy, Viricelle, Jean-Paul

“…A possible way to improve the selectivity of tin dioxide sensors is to deposit a membrane with specific properties above the sensing element. The purpose of…”
Get full text

Detection of Explosive Vapors: Development and Performances of a Fluorescence Sensor by T. Caron, S. Clavaguera, M. Huron, P. Montmeat, E. Pasquinet, J.P. Lere-Porte, F. Serein-Spirau, F. Perraut, P. Prene

“…Abstract preview not available - see full-text PDF article…”
Get full text