Search Results - "Moert, M."

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  1. 1
    FeRAM technology for high density applications

    FeRAM technology for high density applications by Mikolajick, T., Dehm, C., Hartner, W., Kasko, I., Kastner, M.J., Nagel, N., Moert, M., Mazure, C.

    Published in Microelectronics and reliability (01-07-2001)
    “…Ferroelectric random access memories (FeRAMs) are new types of memories especially suitable for mobile applications due to their unique properties like…”
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  2. 2
    Influence of the morphology of ferroelectric SrBi2Ta2O9 thin films deposited by metal organic decomposition on its electrical characteristics

    Influence of the morphology of ferroelectric SrBi2Ta2O9 thin films deposited by metal organic decomposition on its electrical characteristics by MOERT, M, SCHINDLER, G, MIKOLAJICK, T, NAGEL, N, HARTNER, W, DEHRN, C, KOHLSTEDT, H, WASER, R

    Published in Applied surface science (15-08-2005)
    “…The morphologies of SrBi2Ta2O9 (SBT) thin films deposited by metal organic decomposition and crystallized at temperatures between 600 and 800 DGC for 45 min…”
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  3. 3
    Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes

    Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes by Moert, M., Mikolajick, T., Schindler, G., Nagel, N., Hartner, W., Dehm, C., Kohlstedt, H., Waser, R.

    Published in Applied physics letters (02-12-2002)
    “…SrBi 2 Ta 2 O 9 thin films were prepared by metalorganic decomposition on Pt/Ti/SiO2/Si substrates and subsequently crystallized at temperatures ranging from…”
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  4. 4
    Influence of the morphology of ferroelectric SrBi 2Ta 2O 9 thin films deposited by metal organic decomposition on its electrical characteristics

    Influence of the morphology of ferroelectric SrBi 2Ta 2O 9 thin films deposited by metal organic decomposition on its electrical characteristics by Moert, M., Schindler, G., Mikolajick, T., Nagel, N., Hartner, W., Dehm, C., Kohlstedt, H., Waser, R.

    Published in Applied surface science (2005)
    “…The morphologies of SrBi 2Ta 2O 9 (SBT) thin films deposited by metal organic decomposition and crystallized at temperatures between 600 and 800 °C for 45 min…”
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  5. 5
    Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation

    Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation by MOERT, Manfred, MIKOLAJICK, Thomas, SCHINDLER, Guenther, NAGEL, Nicolas, KASKO, Igor, HARTNER, Walter, DEHM, Christine, KOHLSTEDT, Hermann, WASER, Rainer

    Published in Thin solid films (14-02-2005)
    “…The crystallization route of thin SrBi2Ta2O9 (SBT) films deposited on Pt(100 nm)/Ti(10 nm)/SiO2/Si substrate is investigated at different annealing…”
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  6. 6
    Effect of linewidth fluctuations and sidewall roughness in scatterometry

    Effect of linewidth fluctuations and sidewall roughness in scatterometry by Schuster, T., Kenvien, N., Osten, W., Reinig, P., Moert, M., Hingst, T., Mantz, U.

    “…We investigated the effect of linewidth fluctuations and sidewall roughness on wavelength spectra in scatterometry using rigorous coupled wave analysis. For…”
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