Search Results - "Moeller, Berthold"

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    Edge trimming for surface activated dielectric bonded wafers by Inoue, Fumihiro, Jourdain, Anne, Visker, Jakob, Peng, Lan, Moeller, Berthold, Yokoyama, Kaori, Phommahaxay, Alain, Rebibis, Kenneth June, Miller, Andy, Beyne, Eric, Sleeckx, Erik

    Published in Microelectronic engineering (05-01-2017)
    “…The impact of the edge trimming process on permanently bonded wafers is described. The edge trimming process is a blade sawing process applied on the Si wafer…”
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    Journal Article
  2. 2

    Application of the surface planer process to Cu pillars and wafer support tape for high-coplanarity wafer-level packaging by Inoue, Fumihiro, Phommahaxay, Alain, Gokita, Yohei, Möller, Berthold, Beyne, Eric

    “…We used the surface planer process to minimize the within-die and within-wafer nonuniformity caused by the nonoptimized Cu pillar and Si thinning processes…”
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    Journal Article
  3. 3

    Advanced Dicing Technologies for Combination of Wafer to Wafer and Collective Die to Wafer Direct Bonding by Inoue, Fumihiro, Phommahaxay, Alain, Podpod, Arnita, Suhard, Samuel, Hoshino, Hitoshi, Moeller, Berthold, Sleeckx, Erik, June Rebibis, Kenneth, Miller, Andy, Beyne, Eric

    “…Feasibility study of alternative dicing technologies for collective die to wafer direct bonding combined with wafer to wafer direct bonded dies has been…”
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    Conference Proceeding
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