Search Results - "Mikagi, K"

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    A new cobalt salicide technology for 0.15-μm CMOS devices by Inoue, K, Mikagi, K, Abiko, H, Chikaki, S, Kikkawa, T

    Published in IEEE transactions on electron devices (01-11-1998)
    “…A new cobalt (Co) salicide technology for sub-quarter micron CMOS transistors has been developed using high-temperature sputtering and in situ vacuum…”
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    Journal Article
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    Solid-liquid interfacial energy of Bi1.5SrCaCu2Ox by NISHI, Y, WATANABE, S, MANABE, T, UCHIDA, S, OGURI, K, IGARASHI, A, MIKAGI, K

    Published in Journal of materials science letters (01-01-1992)
    “…Solid-liquid interfacial energy is known to be one of the sensitive factors controlling the nucleation of a crystal in a liquid. For Bi-Sr-Ca-Cu-O, the…”
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    Journal Article
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    New via formation process for suppressing the leakage current between adjacent vias for hydrogen silicate based inorganic SOG intermetal dielectric by Oda, N., Usami, T., Yokoyama, T., Matsumoto, A., Mikagi, K., Gomi, H., Sakai, I.

    “…The leakage current between the adjacent vias in case of hydrogen silicate based inorganic spin-on glass (HSI-SOG) intermetal dielectric (IMD) is investigated…”
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    Conference Proceeding
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    A thermally stable Ti-W salicide for deep-submicron logic with embedded DRAM by Fujii, K., Kikuta, K., Inoue, K., Mikagi, K., Chikaki, S., Kikkawa, T.

    “…A new titanium-tungsten (Ti-W) salicide process with high-thermal stability has been developed for deep-submicron logic with embedded DRAM. The sheet…”
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    Conference Proceeding
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    Barrier metal free copper damascene interconnection technology using atmospheric copper reflow and nitrogen doping in SiOF film by Mikagi, K., Ishikawa, H., Usami, T., Suzuki, M., Inoue, K., Oda, N., Chikaki, S., Sakai, I., Kikkawa, T.

    “…This paper describes a barrier metal free copper damascene interconnection technology using atmospheric copper reflow and nitrogen doping in SiOF films for…”
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    Conference Proceeding
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    Self-aligned tungsten strapped source/drain and gate technology realizing the lowest sheet resistance for sub-quarter micron CMOS by Sekine, M., Inoue, K., Ito, H., Honma, I., Miyamoto, H., Yoshida, K., Watanabe, H., Mikagi, K., Yamada, Y., Kikkawa, T.

    “…This paper describes a self-aligned tungsten strapped source/drain and gate with the lowest sheet resistance for subquarter micron CMOS. Vapor HF selective…”
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    Conference Proceeding Journal Article
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    A new cobalt salicide technology for 0.15-/spl mu/m CMOS devices by Inoue, K., Mikagi, K., Abiko, H., Chikaki, S., Kikkawa, T.

    Published in IEEE transactions on electron devices (01-11-1998)
    “…A new cobalt (Co) salicide technology for sub-quarter micron CMOS transistors has been developed using high-temperature sputtering and in situ vacuum…”
    Get full text
    Journal Article
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    Isothermal crystallization on the surface of Te-15at % Ge alloy glass by Nishi, Y, Kawakami, M, Mikagi, K

    Published in Journal of materials science (01-01-1987)
    “…Isothermal surface crystallization is investigated for Te-15at % Ge alloy glass. This surface-crystalline pure tellurium nucleates by ageing at low temperature…”
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    Journal Article
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    Solid/Liquid Interfacial Energy of Ni sub 40 Pd sub 40 P sub 20 Alloy Glass by Nishi, Y, Mikagi, K

    Published in Physical review. B, Condensed matter (01-08-1986)
    “…Based on nucleation theory, the solid/liquid interfacial energy for Ni sub 40 Pd sub 40 P sub 20 is estimated to be 100 plus/minus 2 mJ/m exp 2 from the…”
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    Journal Article
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    Solid-liquid interfacial energy of non-metallic bonded elements by NISHI, Y, MIKAGI, K, IGARASHI, A

    Published in Journal of materials science (01-02-1988)
    “…Based on homogeneous nucleation theory, the temperature dependence of the nucleation frequency for crystallization is calculated for a supercooled liquid…”
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    Journal Article
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    Solid-liquid interfacial energy on crystallization in Fe-Si-B alloy glass by NISHI, Y, MIKAGI, K, KANAZAKI, F

    Published in Journal of materials science (01-10-1986)
    “…Isothermal crystallization on ageing is investigated in Fe--10 at.% Si--15 at.% B alloy glass. Based on homogeneous nucleation theory, the solid/liquid…”
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    Journal Article
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    Isothermal crystallization on the surface of Te-15 at% Ge alloy glass by NISHI, Y, KAWAKAMI, M, MIKAGI, K

    Published in Journal of materials science (01-02-1987)
    “…Isothermal surface crystallization is investigated for Te--15 at.% Ge alloy glass. This surface-crystalline pure Te nucleates by ageing at low temperature <…”
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    Journal Article
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    Solid/Liquid Interfacial Energy of Bi sub 1.5 SrCaCu sub 2 O sub x by Nishi, Y, Watanabe, S, Manabe, T, Uchida, S, Oguri, K, Igarashi, A, Mikagi, K

    Published in Journal of materials science letters (01-08-1992)
    “…The solid/liquid interfacial energy of glassy Bi sub 1.5 SrCaCu sub 2 O sub x ceramic during isothermal crystallization above the glass transition temperature…”
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    Journal Article
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    Effect of Peening on T sub c in Liquid-Quenched Crystalline Lead by Nishi, Y, Mikagi, K, Hayashi, N, Igarashi, A

    Published in Journal of materials science letters (01-07-1986)
    “…The effects of peening on the superconduction transition temperature, T sub c , in liquid-quenched pure Pb are investigated. It is concluded that peening is a…”
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    Journal Article