Search Results - "Miikkulainen, V."

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    Ambient pressure x-ray photoelectron spectroscopy study on the initial atomic layer deposition process of platinum by Kokkonen, E., Nieminen, H.-E., Rehman, F., Miikkulainen, V., Putkonen, M., Ritala, M., Huotari, S., Schnadt, J., Urpelainen, S.

    “…The initial adsorption of MeCpPtMe 3 is investigated using synchrotron-based ambient pressure x-ray photoelectron spectroscopy (XPS). The experiments are done…”
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    Journal Article