Search Results - "Mehregany, M"

Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires by Feng, X. L, Matheny, M. H, Zorman, C. A, Mehregany, M, Roukes, M. L

“…We report experimental demonstrations of electrostatically actuated, contact-mode nanoelectromechanical switches based on very thin silicon carbide (SiC)…”
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Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications by Chien-Hung Wu, Zorman, C.A., Mehregany, M.

“…This paper explores the development of high-temperature pressure sensors based on polycrystalline and single-crystalline 3C-SiC piezoresistors and fabricated…”
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Silicon carbide MEMS for harsh environments by Mehregany, M., Zorman, C.A., Rajan, N., Chien Hung Wu

“…Silicon carbide (SiC) is a promising material for the development of high-temperature solid-state electronics and transducers, owing to its excellent…”
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Monocrystalline silicon carbide nanoelectromechanical systems by Yang, Y. T., Ekinci, K. L., Huang, X. M. H., Schiavone, L. M., Roukes, M. L., Zorman, C. A., Mehregany, M.

“…SiC is an extremely promising material for nanoelectromechanical systems given its large Young's modulus and robust surface properties. We have patterned…”
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VHF, UHF and microwave frequency nanomechanical resonators by Huang, X M H, Feng, X L, Zorman, C A, Mehregany, M, Roukes, M L

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Contact physics of gold microcontacts for MEMS switches by Hyman, D., Mehregany, M.

“…This work presents a study of gold metallic contacts regarding contact resistance, heat dissipation, and surface damage in the normal-force regime of tens to…”
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SiC cantilever resonators with electrothermal actuation by Jiang, Liudi, Cheung, R., Hedley, J., Hassan, M., Harris, A.J., Burdess, J.S., Mehregany, M., Zorman, C.A.

“…Cubic SiC cantilever resonators designed for electrothermal actuation are presented. Metal electrodes with both open circuit and short circuit designs have…”
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Monocrystalline NbN nanofilms on a 3C-SiC∕Si substrate by Gao, J. R., Hajenius, M., Tichelaar, F. D., Klapwijk, T. M., Voronov, B., Grishin, E., Gol’tsman, G., Zorman, C. A., Mehregany, M.

“…The authors have realized NbN (100) nanofilms on a 3C-SiC (100)/Si(100) substrate by dc reactive magnetron sputtering at 800°C. High-resolution transmission…”
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6H-SiC JFETs for 450 ^\hbox Differential Sensing Applications by Patil, A.C., Xiao-an Fu, Anupongongarch, C., Mehregany, M., Garverick, S.L.

“…N-channel 6H-SiC depletion-mode junction field-effect transistors (JFETs) have been fabricated, and characterized for use in high-temperature differential…”
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Fabrication and characterization of polycrystalline SiC resonators by Roy, S., DeAnna, R.G., Zorman, C.A., Mehregany, M.

“…This paper presents the development of polycrystalline 3C silicon carbide (polySiC) lateral resonant devices, which are fabricated by a three-mask surface…”
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Fracture toughness of polycrystalline silicon carbide thin films by Bellante, J. J., Kahn, H., Ballarini, R., Zorman, C. A., Mehregany, M., Heuer, A. H.

“…Thin film polycrystalline silicon carbide (poly-SiC) doubly clamped microtensile specimens were fabricated using standard micromachining processes, and…”
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Mechanical properties of epitaxial 3C silicon carbide thin films by Jackson, K.M., Dunning, J., Zorman, C.A., Mehregany, M., Sharpe, W.N.

“…Microscale tensile specimens of epitaxial 3C silicon carbide (3C-SiC) thin films were fabricated on Si substrates and tested to provide measurements of…”
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High-aspect-ratio photolithography for MEMS applications by Miyajima, H., Mehregany, M.

“…High-aspect-ratio photolithography using a commercially available positive photoresist and a conventional contact mask aligner with standard UV light source is…”
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Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines by Rajan, N., Mehregany, M., Zorman, C.A., Stefanescu, S., Kicher, T.P.

“…Bulk micromachining of high-temperature materials is an enabling technology for the application of MEMS devices in high-temperature environments. This paper…”
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Fabrication and testing of surface micromachined polycrystalline SiC micromotors by Yasseen, A.A., Chien Hung Wu, Zorman, C.A., Mehregany, M.

“…The authors present the fabrication and testing of surface micromachined polycrystalline silicon carbide micromotors. A new multilayer fabrication process…”
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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extraction by Wiser, R.F., Tabib-Azar, M., Mehregany, M., Zorman, C.A.

“…This manuscript is the second of a two part series describing the fabrication and testing of megahertz frequency, polycrystalline silicon-carbide (poly-SiC)…”
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Origin of the split Si–H stretch mode on hydrogen terminated 6H-SiC(0001): Titration of crystal truncation by Sieber, N., Stark, T., Seyller, Th, Ley, L., Zorman, C. A., Mehregany, M.

“…Using Fourier-transform infrared absorption spectroscopy, we have studied the Si–H stretch mode on hydrogenated 6H-SiC(0001) and 3C-SiC(111). On 6H-SiC(0001)…”
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Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization by Davis, Robert F., Gehrke, T., Linthicum, K.J., Zheleva, T.S., Preble, E.A., Rajagopal, P., Zorman, C.A., Mehregany, M.

“…Monocrystalline GaN and AlxGa1−xN films have been grown via the pendeo-epitaxy (PE)11Trademark of Nitronex Corporation, Raleigh, NC 27606. technique with and…”
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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication by Wiser, R.F., Juyong Chung, Mehregany, M., Zorman, C.A.

“…This manuscript is the first of a two-part series describing the fabrication and testing of MHz frequency, polycrystalline silicon-carbide (poly-SiC)…”
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Internal stress and elastic modulus measurements on micromachined 3C-SiC thin films by Mehregany, M., Lijun Tong, Matus, L.G., Larkin, D.J.

“…Fabrication of epitaxial 3C-SiC microstructures by bulk micromachining of the underlying silicon substrate was investigated. Initial studies of the mechanical…”
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