Search Results - "McWaid, T. H."
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Design of an atomic force microscope with interferometric position control
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1994)“…Advances in the manufacture of integrated circuits, x‐ray optics, magnetic read–write heads, optical data storage media, and razor blades require advances in…”
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Conference Proceeding -
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Increasing the value of atomic force microscopy process metrology using a high‐accuracy scanner, tip characterization, and morphological image analysis
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-03-1996)“…Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass…”
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Conference Proceeding