Summary Abstract: Germanium thin films deposited by the ionized‐cluster beam technique

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Bibliographic Details
Published in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vol. 5; no. 4; pp. 1911 - 1912
Main Authors:	McCalmont, Jonathan S., Shanks, Howard R., Lakin, Kenneth M.
Format:	Journal Article
Language:	English
Published:	01-07-1987
Subjects:	Ge
Online Access:	Get full text
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Description
ISSN:	0734-2101 1520-8559
DOI:	10.1116/1.574488