Search Results - "McBean, R V"

  • Showing 1 - 2 results of 2
Refine Results
  1. 1

    Device-Level Vacuum Packaging for RF MEMS by Shahriar Rahman, M, Chitteboyina, M M, Butler, D P, Çelik-Butler, Z, Pacheco, S P, McBean, R V

    Published in Journal of microelectromechanical systems (01-08-2010)
    “…For specific RF applications, where the use of MEMS is highly attractive, cost-effective reliable packaging is one of the primary barriers to…”
    Get full text
    Journal Article
  2. 2