Search Results - "Mazzalai, A."

Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors by Matloub, R., Hadad, M., Mazzalai, A., Chidambaram, N., Moulard, G., Sandu, C. S., . Metzger, Th, Muralt, P.

“…The transverse piezoelectric coefficient e31,f of Al1-xScxN thin films was investigated as a function of composition. It increased nearly 50% from x = 0 to x =…”
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A concept of wireless and passive very-high temperature sensor by Nicolay, P., Matloub, R., Bardong, J., Mazzalai, A., Muralt, P.

“…There is a need for sensors capable operating at temperatures above 1000 °C. We describe an innovative sensor that might achieve this goal. The sensor…”
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Engineered a/c domain patterns in multilayer (110) epitaxial Pb(Zr,Ti)O3 thin films: Impact on domain compliance and piezoelectric properties by Mtebwa, M., Mazzalai, A., Sandu, C. S., Crassous, A., Setter, N.

“…While there is extensive literature on the influence of both compressive and tensile strain on the domain patterns of (001) tetragonal ferroelectric thin…”
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Simultaneous piezoelectric and ferroelectric characterization of thin films for MEMS actuators by Mazzalai, A., Balma, D., Chidambaram, N., Li Jin, Muralt, P.

“…The progress in lead zirconate titanate Pb(Zr x ,Ti 1-x )O 3 (PZT) thin film deposition and integration technology has led to an exponential growth of…”
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Niobium doped lead zirconate titanate thin films grown by chemical solution deposition by Chidambaram, N., Mazzalai, A., Sandu, C., Balma, D., Muralt, P., Faralli, D., Colombo, L., Fusi, M.

“…Niobium (Nb) doping is known to have a beneficial effect on many properties of lead zirconate titanate (PZT) ceramics. Substituting titanium (Ti) or zirconium…”
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Comparison of lead Zirconate Titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes by Chidambaram, N., Mazzalai, A., Balma, D., Muralt, P.

“…Lead zirconate titanate (PZT) thin films on insulator- buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more…”
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Dynamic and long-time tests of the transverse piezoelectric coefficient in PZT thin films by Mazzalai, A., Balma, D., Chidambaram, N., Muralt, P., Colombo, L.

“…A set up originally designed for e 31f measurements of piezoelectric thin films was operated in a way to assess life time issues with simultaneous recording of…”
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Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes by Chidambaram, N., Mazzalai, A., Muralt, P.

“…PZT thin films on insulator buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate…”
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Al(1−x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting by Matloub, R., Hadad, M., Sandu, C. S., Chidambaram, N., Mazzalai, A., Muralt, P., Moulard, G., Metzger, Th

“…We report on microstructure evolution and enhancement of longitudinal and transverse piezoelectric responses of AlN thin film with partial substitution of Al…”
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High frequency torsional MEMS scanner for displays by Baran, U., Brown, D., Holmstrom, S., Balma, D., Davis, W. O., Mazzalai, A., Muralt, P., Urey, H.

“…A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a…”
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