Search Results - "Mazaleyrat, G."
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Multiscale Modeling of the Atomic Layer Deposition of HfO2 Thin Film Grown on Silicon: How to Deal with a Kinetic Monte Carlo Procedure
Published in Journal of chemical theory and computation (11-11-2008)“…An original integrated approach developed within a multiscale strategy, which combines first-principles quantum simulations and kinetic Monte Carlo (KMC), is…”
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Journal Article -
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A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon
Published in Computational materials science (01-04-2005)“…A new kinetic Monte Carlo (KMC) method is presented to investigate the atomic layer deposition (ALD) of alumina onto silicon. Atoms are located on predefined…”
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Journal Article Conference Proceeding -
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