Search Results - "Mazaleyrat, G."

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    Multiscale Modeling of the Atomic Layer Deposition of HfO2 Thin Film Grown on Silicon: How to Deal with a Kinetic Monte Carlo Procedure by Dkhissi, A, Estève, A, Mastail, C, Olivier, S, Mazaleyrat, G, Jeloaica, L, Djafari Rouhani, M

    Published in Journal of chemical theory and computation (11-11-2008)
    “…An original integrated approach developed within a multiscale strategy, which combines first-principles quantum simulations and kinetic Monte Carlo (KMC), is…”
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    Journal Article
  2. 2

    A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon by Mazaleyrat, G., Estève, A., Jeloaica, L., Djafari-Rouhani, M.

    Published in Computational materials science (01-04-2005)
    “…A new kinetic Monte Carlo (KMC) method is presented to investigate the atomic layer deposition (ALD) of alumina onto silicon. Atoms are located on predefined…”
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    Journal Article Conference Proceeding
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