Search Results - "Mazaev, K.M."

Effect of V/III ratio in AlN and AlGaN MOVPE by Lobanova, A.V., Mazaev, K.M., Talalaev, R.A, Leys, M., Boeykens, S., Cheng, K., Degroote, S.

“…Experimental studies of AlN and AlGaN deposition in a 3×2″ Thomas Swan close-coupled showerhead reactor have revealed the effect of growth rate reduction at…”
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Modeling and experimental analysis of AlGaN MOVPE in commercial vertical high-speed rotating-disk reactors by Mazaev, K.M., Lobanova, A.V., Yakovlev, E.V., Talalaev, R.A., Galyukov, A.O., Makarov, Yu.N., Gotthold, D., Albert, B., Kadinski, L., Peres, B.

“…A combined modeling and experimental analysis of GaN/AlGaN deposition in the commercial vertical high-speed rotating-disk reactors produced by EMCORE is…”
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