Overgrowth of InGaAsP materials on rectangular-patterned gratings using GSMBE
Periodic perturbations of the refractive index is a foundation for realizing InP-based single mode photonic devices for all-optical communication networks. In order to achieve a particular refractive index modulation, such as that required by distributed feedback lasers and Bragg grating resonators,...
Saved in:
Published in: | Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials pp. 62 - 65 |
---|---|
Main Authors: | , , , , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
1997
|
Subjects: | |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | Periodic perturbations of the refractive index is a foundation for realizing InP-based single mode photonic devices for all-optical communication networks. In order to achieve a particular refractive index modulation, such as that required by distributed feedback lasers and Bragg grating resonators, the periodic structure must reside within the device, necessitating epitaxial overgrowth. Results of an investigation of a low temperature oxide removal technique combined with gas source molecular beam epitaxial overgrowth of X-ray lithographically patterned rectangular gratings will be presented. |
---|---|
ISBN: | 9780780338982 0780338987 |
ISSN: | 1092-8669 |
DOI: | 10.1109/ICIPRM.1997.600029 |