Search Results - "Materano, Monica"
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1
Polarization switching in thin doped HfO2 ferroelectric layers
Published in Applied physics letters (28-12-2020)“…The deployment of ferroelectrics in device concepts such as Ferroelectric Random Access Memory and Ferroelectric Field Effect Transistors requires a good…”
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Journal Article -
2
HfxZr1 − xO2 thin films for semiconductor applications: An Hf- and Zr-ALD precursor comparison
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-03-2020)“…In the last few years, hafnium oxide (HfO2), zirconium oxide (ZrO2), and their intermixed system (HfxZr1 − xO2) have aroused more and more interest due to…”
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3
A Gibbs energy view of double hysteresis in ZrO2 and Si-doped HfO2
Published in Applied physics letters (05-10-2020)“…The Gibbs energy can yield fundamental insight into the material properties of ferroelectrics such as energy barriers and phase transitions. Particularly for…”
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4
Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO2 films
Published in Applied physics letters (18-01-2021)“…We investigate the emerging chemical states of TiN/HfO2/TiN capacitors and focus especially on the identification of vacancies and impurities in the…”
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Journal Article -
5
Many routes to ferroelectric HfO2: A review of current deposition methods
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-01-2022)“…Although 10 years have passed since the initial report of ferroelectricity in hafnia (HfO2), researchers are still intensely fascinated by this material system…”
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Book Review Journal Article -
6
Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
Published in Japanese Journal of Applied Physics (01-11-2019)“…Different causes for ferroelectric properties in hafnium oxide were discussed during the last decade including various dopants, stress, electrode materials,…”
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Journal Article -
7
Origin of Ferroelectric Phase in Undoped HfO2 Films Deposited by Sputtering
Published in Advanced materials interfaces (07-06-2019)“…Thin film metal–insulator–metal capacitors with undoped HfO2 as the insulator are fabricated by sputtering from ceramic targets and subsequently annealed. The…”
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8
Bulk Depolarization Fields as a Major Contributor to the Ferroelectric Reliability Performance in Lanthanum Doped Hf0.5Zr0.5O2 Capacitors
Published in Advanced materials interfaces (01-11-2019)“…After the discovery of ferroelectricity in HfO2, many dopants have been incorporated into the material to improve the ferroelectric properties. The binary…”
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9
Harnessing Phase Transitions in Antiferroelectric ZrO2 Using the Size Effect
Published in Advanced electronic materials (01-01-2022)“…The unique nonlinear dielectric properties of antiferroelectric (AFE) oxides are promising for advancements in solid state supercapacitor, actuator, and memory…”
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10
1T1C FeRAM Memory Array Based on Ferroelectric HZO With Capacitor Under Bitline
Published in IEEE journal of the Electron Devices Society (2022)“…A novel system-on-a-chip compatible one-transistor one-capacitor ferroelectric random-access memory array (1T1C FeRAM) based on ferroelectric Hf 0.5 Zr 0.5 O 2…”
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Journal Article -
11
Built-In Bias Generation in Anti-Ferroelectric Stacks: Methods and Device Applications
Published in IEEE journal of the Electron Devices Society (01-01-2018)“…The discovery of ferroelectric (FE) properties in binary oxides has enabled CMOS compatible and scalable FE memories. Recently, we reported a simple approach…”
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12
Reliability Study of 1T1C FeRAM Arrays With Hf0.5Zr0.5O₂ Thickness Scaling
Published in IEEE journal of the Electron Devices Society (2022)“…We have reported that film thickness scaling of ferroelectric Hf 0.5 Zr 0.5 O 2 (HZO) allows hafnium-based one- transistor and one-capacitor (1T1C)…”
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Journal Article -
13
Origin of Ferroelectric Phase in Undoped HfO2 Films Deposited by Sputtering
Published in Advanced materials interfaces (01-10-2019)Get full text
Journal Article -
14
The Electrode‐Ferroelectric Interface as the Primary Constraint on Endurance and Retention in HZO‐Based Ferroelectric Capacitors
Published in Advanced functional materials (18-10-2023)“…Abstract Ferroelectric hafnium‐zirconium oxide is one of the most relevant CMOS‐compatible materials for next‐generation, non‐volatile memory devices…”
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15
Raman Spectroscopy as a Key Method to Distinguish the Ferroelectric Orthorhombic Phase in Thin ZrO2‐Based Films
Published in Physica status solidi. PSS-RRL. Rapid research letters (01-04-2022)“…Inducing and detecting the polar orthorhombic phase are crucial for the establishment of ferroelectricity in HfO2‐ and ZrO2‐based thin films. Unfortunately,…”
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Journal Article -
16
Role of Oxygen Source on Buried Interfaces in Atomic-Layer-Deposited Ferroelectric Hafnia–Zirconia Thin Films
Published in ACS applied materials & interfaces (21-09-2022)“…Hafnia–zirconia (HfO2–ZrO2) solid solution thin films have emerged as viable candidates for electronic applications due to their compatibility with Si…”
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Journal Article -
17
SoC Compatible 1T1C FeRAM Memory Array Based on Ferroelectric Hf0.5Zr0.5O2
Published in 2020 IEEE Symposium on VLSI Technology (01-06-2020)“…This paper experimentally demonstrates fundamental memory array operation of a ferroelectric HfO 2 -based 1T1C FeRAM. Metal/ferroelectric/metal (MFM)…”
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Conference Proceeding -
18
Temperature‐Dependent Phase Transitions in HfxZr1‐xO2 Mixed Oxides: Indications of a Proper Ferroelectric Material
Published in Advanced electronic materials (01-09-2022)“…Knowledge about phase transitions in doped HfO2 and ZrO2‐based films is crucial for developing future ferroelectric devices. These devices should perform in…”
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Journal Article -
19
Raman Spectroscopy as a Key Method to Distinguish the Ferroelectric Orthorhombic Phase in Thin ZrO 2 ‐Based Films
Published in Physica status solidi. PSS-RRL. Rapid research letters (01-04-2022)“…Inducing and detecting the polar orthorhombic phase are crucial for the establishment of ferroelectricity in HfO 2 ‐ and ZrO 2 ‐based thin films…”
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Journal Article -
20
Many routes to ferroelectric HfO2: A review of current deposition methods
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-12-2021)“…Although 10 years have passed since the initial report of ferroelectricity in hafnia (HfO2), researchers are still intensely fascinated by this material system…”
Get full text
Journal Article