Tailoring properties of lossy-mode resonance optical fiber sensors with atomic layer deposition technique

Tailoring properties of lossy-mode resonance optical fiber sensors with atomic layer deposition technique

•Two-nanofilm-comprising overlay for lossy mode resonance fiber sensor is presented.•Two various high-refractive-index materials were applied for the overlay fabrication.•Oxides of hafnium, zirconium and tantalum and also silicon nitride were tested.•Two deposition techniques were applied for succes...

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Bibliographic Details
Published in:Optics and laser technology Vol. 102; pp. 213 - 221
Main Authors: Kosiel, Kamil, Koba, Marcin, Masiewicz, Marcin, Śmietana, Mateusz
Format: Journal Article
Language:English
Published: Kidlington Elsevier Ltd 01-06-2018
Elsevier BV
Subjects:
Atomic layer deposition
Atomic layer epitaxy
Chemical vapor deposition
Dielectrics
Hafnium oxide
Lossy-mode resonance
Optical fiber sensors
Optical properties
Optics
Sensors
Silicon nitride
Tantalum oxides
Thin films
Zirconium dioxide
Thin films
Optical fiber sensors
Atomic layer deposition
Lossy-mode resonance
Optical properties
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Description
Summary:•Two-nanofilm-comprising overlay for lossy mode resonance fiber sensor is presented.•Two various high-refractive-index materials were applied for the overlay fabrication.•Oxides of hafnium, zirconium and tantalum and also silicon nitride were tested.•Two deposition techniques were applied for successful fabrication of such an overlay.•Atomic layer deposition is a very useful tool for the sensorial response tailoring. The paper shows application of atomic layer deposition (ALD) technique as a tool for tailoring sensorial properties of lossy-mode-resonance (LMR)-based optical fiber sensors. Hafnium dioxide (HfO2), zirconium dioxide (ZrO2), and tantalum oxide (TaxOy), as high-refractive-index dielectrics that are particularly convenient for LMR-sensor fabrication, were deposited by low-temperature (100 °C) ALD ensuring safe conditions for thermally vulnerable fibers. Applicability of HfO2 and ZrO2 overlays, deposited with ALD-related atomic level thickness accuracy for fabrication of LMR-sensors with controlled sensorial properties was presented. Additionally, for the first time according to our best knowledge, the double-layer overlay composed of two different materials - silicon nitride (SixNy) and TaxOy - is presented for the LMR fiber sensors. The thin films of such overlay were deposited by two different techniques – PECVD (the SixNy) and ALD (the TaxOy). Such approach ensures fast overlay fabrication and at the same time facility for resonant wavelength tuning, yielding devices with satisfactory sensorial properties.
ISSN:0030-3992
1879-2545
DOI:10.1016/j.optlastec.2018.01.002