Search Results - "Marathe, V.G"
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A model to study the effect of selective anodic oxidation on ultrathin gate oxides
Published in IEEE transactions on electron devices (01-01-2005)Get full text
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A model to study the effect of selective anodic oxidation on ultrathin gate oxides
Published in IEEE transactions on electron devices (01-01-2005)“…We have studied the effect of selective anodic oxidation on ultrathin (22-31 /spl Aring/) silicon dioxide grown at different temperatures ranging from 600/spl…”
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Journal Article