Search Results - "Marangon, M.S."
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1
Nucleation and growth of CVD-W on TiN studied by X-ray fluorescence spectrometry
Published in Applied surface science (01-10-1995)“…The initial stage of the chemical vapor deposition (CVD) of W films based on the silane and hydrogen reduction of tungsten hexafluoride has been studied by…”
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Journal Article Conference Proceeding -
2
Aluminum Thinning onto Blanket and Etched Back Tungsten Plugs: Simulation of Geometrical Effects
Published in ESSDERC '92: 22nd European Solid State Device Research conference (1992)“…The blanket and etch back technique has been been introduced successfully in process flows for vias and contact holes filling. The possibility of application…”
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Conference Proceeding