Search Results - "Manfrinato, Vitor R"

Resolution Limits of Electron-Beam Lithography toward the Atomic Scale by Manfrinato, Vitor R, Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G, Stach, Eric A, Berggren, Karl K

“…We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5…”
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Anisotropic Etching and Nanoribbon Formation in Single-Layer Graphene by Campos, Leonardo C, Manfrinato, Vitor R, Sanchez-Yamagishi, Javier D, Kong, Jing, Jarillo-Herrero, Pablo

“…We demonstrate anisotropic etching of single-layer graphene by thermally activated nickel nanoparticles. Using this technique, we obtain sub-10-nm nanoribbons…”
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Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale by Manfrinato, Vitor R, Stein, Aaron, Zhang, Lihua, Nam, Chang-Yong, Yager, Kevin G, Stach, Eric A, Black, Charles T

“…Patterning materials efficiently at the smallest length scales is a longstanding challenge in nanotechnology. Electron-beam lithography (EBL) is the primary…”
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High-Energy Surface and Volume Plasmons in Nanopatterned Sub-10 nm Aluminum Nanostructures by Hobbs, Richard G, Manfrinato, Vitor R, Yang, Yujia, Goodman, Sarah A, Zhang, Lihua, Stach, Eric A, Berggren, Karl K

“…In this work, we use electron energy-loss spectroscopy to map the complete plasmonic spectrum of aluminum nanodisks with diameters ranging from 3 to 120 nm…”
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Patterning Si at the 1 nm Length Scale with Aberration‐Corrected Electron‐Beam Lithography: Tuning of Plasmonic Properties by Design by Manfrinato, Vitor R., Camino, Fernando E., Stein, Aaron, Zhang, Lihua, Lu, Ming, Stach, Eric A., Black, Charles T.

“…Patterning of materials at single nanometer resolution allows engineering of quantum confinement effects, as these effects are significant at these length…”
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Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function by Manfrinato, Vitor R, Wen, Jianguo, Zhang, Lihua, Yang, Yujia, Hobbs, Richard G, Baker, Bowen, Su, Dong, Zakharov, Dmitri, Zaluzec, Nestor J, Miller, Dean J, Stach, Eric A, Berggren, Karl K

“…One challenge existing since the invention of electron-beam lithography (EBL) is understanding the exposure mechanisms that limit the resolution of EBL. To…”
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1‐nm Si Patterning: Patterning Si at the 1 nm Length Scale with Aberration‐Corrected Electron‐Beam Lithography: Tuning of Plasmonic Properties by Design (Adv. Funct. Mater. 52/2019) by Manfrinato, Vitor R., Camino, Fernando E., Stein, Aaron, Zhang, Lihua, Lu, Ming, Stach, Eric A., Black, Charles T.

“…In article number 1903429, Vitor R. Manfrinato, Fernando E. Camino, and co‐workers achieve 1‐nm resolution Si patterning using aberration‐corrected…”
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Neon Ion Beam Lithography (NIBL) by Winston, Donald, Manfrinato, Vitor R, Nicaise, Samuel M, Cheong, Lin Lee, Duan, Huigao, Ferranti, David, Marshman, Jeff, McVey, Shawn, Stern, Lewis, Notte, John, Berggren, Karl K

“…Existing techniques for electron- and ion-beam lithography, routinely employed for nanoscale device fabrication and mask/mold prototyping, do not…”
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope by Camino, Fernando E, Manfrinato, Vitor R, Stein, Aaron, Zhang, Lihua, Lu, Ming, Stach, Eric A, Black, Charles T

“…We demonstrate extension of electron-beam lithography using conventional resists and pattern transfer processes to single-digit nanometer dimensions by…”
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The Orientations of Large Aspect-Ratio Coiled-Coil Proteins Attached to Gold Nanostructures by Chang, Jae-Byum, Kim, Yong Ho, Thompson, Evan, No, Young Hyun, Kim, Nam Hyeong, Arrieta, Jose, Manfrinato, Vitor R., Keating, Amy E., Berggren, Karl K.

“…Methods for patterning biomolecules on a substrate at the single molecule level have been studied as a route to sensors with single‐molecular sensitivity or as…”
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Sub-5 keV electron-beam lithography in hydrogen silsesquioxane resist by Manfrinato, Vitor R., Cheong, Lin Lee, Duan, Huigao, Winston, Donald, Smith, Henry I., Berggren, Karl K.

“…We fabricated 9–30 nm half-pitch nested Ls and 13–15 nm half-pitch dot arrays, using 2 keV electron-beam lithography with hydrogen silsesquioxane (HSQ) as the…”
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Patterning Si at the 1 nm Length Scale with Aberration-Corrected Electron-Beam Lithography: Tuning of Plasmonic Properties by Design by Manfrinato, Vitor R., Camino, Fernando E., Stein, Aaron, Zhang, Lihua, Lu, Ming, Stach, Eric A., Black, Charles T.

“…Patterning of materials at single nanometer resolution allows engineering of quantum confinement effects, as these effects are significant at these length…”
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope by Camino, Fernando E., Manfrinato, Vitor R., Stein, Aaron, Zhang, Lihua, Lu, Ming, Stach, Eric A., Black, Charles T.

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Resolution Limits of Electron-Beam Lithography toward the Atomic Scale by Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., Berggren, Karl K.

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Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function by Manfrinato, Vitor R., Wen, Jianguo, Zhang, Lihua, Yang, Yujia, Hobbs, Richard G., Baker, Bowen, Su, Dong, Zakharov, Dmitri, Zaluzec, Nestor J., Miller, Dean J., Stach, Eric A., Berggren, Karl K.

“…One challenge existing since the invention of electron-beam lithography (EBL) is understanding the exposure mechanisms that limit the resolution of EBL. To…”
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Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function by Manfrinato, Vitor R., Wen, Jianguo, Zhang, Lihua, Yang, Yujia, Hobbs, Richard G., Baker, Bowen, Su, Dong, Zakharov, Dmitri, Zaluzec, Nestor J., Miller, Dean J., Stach, Eric A., Berggren, Karl K.

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Sub-5keV electron-beam lithography in hydrogen silsesquioxane resist by Manfrinato, Vitor R., Cheong, Lin Lee, Duan, Huigao, Winston, Donald, Smith, Henry I., Berggren, Karl K.

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Neon Ion Beam Lithography (NIBL) by Winston, Donald, Manfrinato, Vitor R., Nicaise, Samuel M., Cheong, Lin Lee, Duan, Huigao, Ferranti, David, Marshman, Jeff, McVey, Shawn, Stern, Lewis, Notte, John, Berggren, Karl K.

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Single-molecule study on the orientation of coiled-coil proteins attached to gold nanostructures by Chang, Jae-Byum, Kim, Yong Ho, Thompson, Evan, No, Young Hyun, Kim, Nam Hyeong, Arrieta, Jose, Manfrinato, Vitor R, Keating, Amy E, Berggren, Karl K

“…Methods for patterning biomolecules on a substrate at the single molecule level have been studied as a route to sensors with single-molecular sensitivity or as…”
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Designs for a Quantum Electron Microscope by Kruit, Pieter, Hobbs, Richard G, Kim, Chung-Soo, Yang, Yujia, Manfrinato, Vitor R, Hammer, Jacob, Thomas, Sebastian, Weber, Philipp, Klopfer, Brannon, Kohstall, Christoph, Juffmann, Thomas, Kasevich, Mark A, Hommelhoff, Peter, Berggren, Karl K

“…One of the astounding consequences of quantum mechanics is that it allows the detection of a target using an incident probe, with only a low probability of…”
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