Search Results - "Malyshev, V. M."
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Transfer of the Temperature of the Triple Point of Water with an Acoustic Resonator Using the Comparison Method
Published in Measurement techniques (01-02-2017)“…We consider a method of transferring the temperature of the triple point of water with an acoustic resonator configuration for measuring the Boltzmann…”
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Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature
Published in Applied physics letters (16-10-2000)“…We report measurements of the bulk, neutral gas temperature in a chlorine transformer-coupled plasma. A trace amount (2%–5%) of N2 was added to the discharge…”
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Experimental investigation of high-energy photon splitting in atomic fields
Published in Physical review letters (05-08-2002)“…Data analysis of an experiment in which photon splitting in atomic fields was observed is presented. The experiment was performed at the tagged photon beam of…”
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Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-05-1997)“…A method is described for determining the electron temperature of a low pressure plasma of the type used in microelectronics materials processing. A small…”
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Plasma-Chemical Synthesis of Ytterbium Doped As–S Thin Films
Published in Plasma chemistry and plasma processing (01-11-2021)“…In this work, for the first time, the Plasma-enhanced chemical vapor deposition (PECVD) method was used for the direct one-stage synthesis of the…”
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Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates
Published in High energy chemistry (01-12-2023)“…Gallium monosulfide (GaS), a representative of Group III monochalcogenide layered materials, is a wide-bandgap semiconductor. It is considered an ideal…”
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Preparing Thin Gallium Sulphide Films via PECVD and Studying Their Properties
Published in Russian Journal of Physical Chemistry A (2023)“…Thin films of GaS х are obtained via plasma-enhanced chemical vapor deposition (PECVD) for the first time, while high-purity volatile derivatives of the…”
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Addendum to: Measurement of Γee(J/ψ) with KEDR detector
Published in The journal of high energy physics (01-07-2020)“…The electronic width of the J / ψ meson and its product by the branching fractions of J / ψ meson decay to hadrons and electrons measured with the KEDR…”
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Fine Purification of Substances by Countercurrent Sublimation
Published in Theoretical foundations of chemical engineering (01-09-2018)“…A countercurrent sublimation method is proposed in order to increase the efficiency of the separation and purification of substances such as iodine, the…”
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Calculation of Xenon Distribution Coefficient in the Process of Natural Gas Separation by Gas Hydrate Crystallization
Published in Russian Journal of Physical Chemistry A (01-11-2019)“…Xenon is recovered via gas hydrate crystallization from gas mixtures modeling natural gas compositions based on methane (CH 4 ) with impurity…”
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Improving the efficiency of gas hydrate crystallization due to the application of gas separation membranes
Published in Theoretical foundations of chemical engineering (01-07-2016)“…To improve the efficiency in of the separation and purification of gases by the method of gashydrate crystallization, the possibility of combining it with the…”
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Removal of carbon tetrafluoride from nitrogen trifluoride by gas hydrate crystallization
Published in Inorganic materials (01-05-2014)“…This paper examines the separation of gas mixtures based on nitrogen trifluoride and carbon tetrafluoride by different versions of gas hydrate crystallization…”
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Calculating the separation coefficients in argon, krypton and xenon gas mixture separation by gas hydrate crystallization
Published in Russian Journal of Physical Chemistry (01-11-2011)“…The separation of gas mixtures based on noble gases by means of gas hydrate crystallization is considered for various schemes of the process. The separation…”
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Diagnostic studies of aluminum etching in an inductively coupled plasma system: Determination of electron temperatures and connections to plasma-induced damage
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2000)“…Using trace rare gases-optical emission spectroscopy (TRG-OES) and Langmuir probe measurements, electron temperatures (T e ) were obtained in Cl 2 /BCl 3 /N 2…”
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Mask charging and profile evolution during chlorine plasma etching of silicon
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2000)“…Nonideal feature profile anomalies such as undercut, tapered, or bowed sidewalls and microtrenches at the base of trench sidewalls are often observed after…”
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Feature evolution during plasma etching. II. Polycrystalline silicon etching
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2000)“…The effect of source power, bias power, chamber pressure, flow rate, and feed gas composition on profile evolution during polycrystalline silicon etching with…”
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New precision measurement of the J/ψ- and ψ′-meson masses
Published in Physics letters. B (30-10-2003)“…A new high precision measurement of the J/ψ- and ψ′-meson masses has been performed at the VEPP-4M collider using the KEDR detector. The resonant…”
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Trace rare gases optical emission spectroscopy: nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
Published in Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics (01-11-1999)“…Trace rare gases optical emission spectroscopy (TRG-OES) is a new, nonintrusive method for determining electron temperatures (T(e)) and, under some conditions,…”
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Laser-induced fluorescence and Langmuir probe determination of Cl2+ and Cl+ absolute densities in transformer-coupled chlorine plasmas
Published in Applied physics letters (22-03-1999)“…Laser induced fluorescence detection of Cl2+ has been used to track their relative concentration in a high-density inductively (transformer) coupled (TCP) 10…”
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