Search Results - "Malyshev, V. M."

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  1. 1

    Transfer of the Temperature of the Triple Point of Water with an Acoustic Resonator Using the Comparison Method by Malyshev, V. M., Pilipenko, K. D.

    Published in Measurement techniques (01-02-2017)
    “…We consider a method of transferring the temperature of the triple point of water with an acoustic resonator configuration for measuring the Boltzmann…”
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    Journal Article
  2. 2

    Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature by Donnelly, V. M., Malyshev, M. V.

    Published in Applied physics letters (16-10-2000)
    “…We report measurements of the bulk, neutral gas temperature in a chlorine transformer-coupled plasma. A trace amount (2%–5%) of N2 was added to the discharge…”
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    Journal Article
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    Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry by Malyshev, M. V., Donnelly, V. M.

    “…A method is described for determining the electron temperature of a low pressure plasma of the type used in microelectronics materials processing. A small…”
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    Conference Proceeding Journal Article
  5. 5

    Plasma-Chemical Synthesis of Ytterbium Doped As–S Thin Films by Mochalov, L. A., Kudryashov, M. A., Logunov, A. A., Kudryashova, Yu. P., Malyshev, V. M., Drozdov, P. N., Kovalev, A. V., Vorotyntsev, V. M.

    Published in Plasma chemistry and plasma processing (01-11-2021)
    “…In this work, for the first time, the Plasma-enhanced chemical vapor deposition (PECVD) method was used for the direct one-stage synthesis of the…”
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    Journal Article
  6. 6

    Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates by Kudryashov, M. A., Mochalov, L. A., Prokhorov, I. O., Vshivtsev, M. A., Kudryashova, Yu. P., Malyshev, V. M., Slapovskaya, E. A.

    Published in High energy chemistry (01-12-2023)
    “…Gallium monosulfide (GaS), a representative of Group III monochalcogenide layered materials, is a wide-bandgap semiconductor. It is considered an ideal…”
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    Journal Article
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    Preparing Thin Gallium Sulphide Films via PECVD and Studying Their Properties by Mochalov, L. A., Kudryashov, M. A., Logunov, A. A., Vshivtsev, M. A., Prokhorov, I. O., Vorotyntsev, V. M., Malyshev, V. M., Sazanova, T. S., Kudryashova, Yu. P., Bulanov, E. N., Knyazev, A. V.

    “…Thin films of GaS х are obtained via plasma-enhanced chemical vapor deposition (PECVD) for the first time, while high-purity volatile derivatives of the…”
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    Journal Article
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    Addendum to: Measurement of Γee(J/ψ) with KEDR detector by Anashin, V. V., Aulchenko, V. M., Baldin, E. M., Barladyan, A. K., Barnyakov, A. Y., Barnyakov, M. Y., Baru, S. E., Bedny, I. V., Blinov, A. E., Blinov, V. E., Bobrov, A. V., Bobrovnikov, V. S., Bogomyagkov, A. V., Bondar, A. E., Bondarev, D. V., Buzykaev, A. R., Eidelman, S. I., Glukhovchenko, Y. M., Gulevich, V. V., Gusev, D. V., Karnaev, S. E., Karpov, G. V., Karpov, S. V., Kharlamova, T. A., Kiselev, V. A., Kononov, S. A., Kotov, K. Y., Kravchenko, E. A., Kulikov, V. F., Kurkin, G. Y., Kuper, E. A., Levichev, E. B., Maksimov, D. A., Malyshev, V. M., Maslennikov, A. L., Medvedko, A. S., Meshkov, O. I., Mishnev, S. I., Morozov, I. I., Muchnoi, N. Y., Neufeld, V. V., Nikitin, S. A., Nikolaev, I. B., Okunev, I. N., Onuchin, A. P., Oreshkin, S. B., Orlov, I. O., Osipov, A. A., Peleganchuk, S. V., Pivovarov, S. G., Piminov, P. A., Petrov, V. V., Poluektov, A. O., Popkov, I. N., Prisekin, V. G., Rezanova, O. L., Ruban, A. A., Sandyrev, V. K., Savinov, G. A., Shamov, A. G., Shatilov, D. N., Shwartz, B. A., Simonov, E. A., Sinyatkin, S. V., Skovpen, Y. I., Skrinsky, A. N., Smaluk, V. V., Sokolov, A. V., Sukharev, A. M., Starostina, E. V., Talyshev, A. A., Tayursky, V. A., Telnov, V. I., Tikhonov, Y. A., Todyshev, K. Y., Tumaikin, G. M., Usov, Y. V., Vorobiov, A. I., Yushkov, A. N., Zhilich, V. N., Zhulanov, V. V., Zhuravlev, A. N.

    Published in The journal of high energy physics (01-07-2020)
    “…The electronic width of the J / ψ meson and its product by the branching fractions of J / ψ meson decay to hadrons and electrons measured with the KEDR…”
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    Journal Article
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    Fine Purification of Substances by Countercurrent Sublimation by Vorotyntsev, V. M., Malyshev, V. M., Petukhov, A. N.

    “…A countercurrent sublimation method is proposed in order to increase the efficiency of the separation and purification of substances such as iodine, the…”
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    Journal Article
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    Calculation of Xenon Distribution Coefficient in the Process of Natural Gas Separation by Gas Hydrate Crystallization by Sergeeva, M. S., Petukhov, A. N., Shablykin, D. N., Malyshev, V. M., Vorotyntsev, V. M.

    Published in Russian Journal of Physical Chemistry A (01-11-2019)
    “…Xenon is recovered via gas hydrate crystallization from gas mixtures modeling natural gas compositions based on methane (CH 4 ) with impurity…”
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    Journal Article
  11. 11

    Improving the efficiency of gas hydrate crystallization due to the application of gas separation membranes by Vorotyntsev, V. M., Malyshev, V. M., Vorotyntsev, I. V., Battalov, S. V.

    “…To improve the efficiency in of the separation and purification of gases by the method of gashydrate crystallization, the possibility of combining it with the…”
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    Journal Article
  12. 12

    Removal of carbon tetrafluoride from nitrogen trifluoride by gas hydrate crystallization by Vorotyntsev, V. M., Malyshev, V. M., Yarullina, A. F.

    Published in Inorganic materials (01-05-2014)
    “…This paper examines the separation of gas mixtures based on nitrogen trifluoride and carbon tetrafluoride by different versions of gas hydrate crystallization…”
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    Journal Article
  13. 13

    Calculating the separation coefficients in argon, krypton and xenon gas mixture separation by gas hydrate crystallization by Vorotyntsev, V. M., Malyshev, V. M.

    Published in Russian Journal of Physical Chemistry (01-11-2011)
    “…The separation of gas mixtures based on noble gases by means of gas hydrate crystallization is considered for various schemes of the process. The separation…”
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    Journal Article
  14. 14

    Diagnostic studies of aluminum etching in an inductively coupled plasma system: Determination of electron temperatures and connections to plasma-induced damage by Malyshev, M. V., Donnelly, V. M., Downey, S. W., Colonell, J. I., Layadi, N.

    “…Using trace rare gases-optical emission spectroscopy (TRG-OES) and Langmuir probe measurements, electron temperatures (T e ) were obtained in Cl 2 /BCl 3 /N 2…”
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    Journal Article
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    Mask charging and profile evolution during chlorine plasma etching of silicon by Bogart, K. H. A., Klemens, F. P., Malyshev, M. V., Colonell, J. I., Donnelly, V. M., Lee, J. T. C., Lane, J. M.

    “…Nonideal feature profile anomalies such as undercut, tapered, or bowed sidewalls and microtrenches at the base of trench sidewalls are often observed after…”
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    Journal Article
  16. 16

    Feature evolution during plasma etching. II. Polycrystalline silicon etching by Lane, J. M., Klemens, F. P., Bogart, K. H. A., Malyshev, M. V., Lee, J. T. C.

    “…The effect of source power, bias power, chamber pressure, flow rate, and feed gas composition on profile evolution during polycrystalline silicon etching with…”
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    Journal Article
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    Trace rare gases optical emission spectroscopy: nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas by Malyshev, M V, Donnelly, V M

    “…Trace rare gases optical emission spectroscopy (TRG-OES) is a new, nonintrusive method for determining electron temperatures (T(e)) and, under some conditions,…”
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    Journal Article
  20. 20

    Laser-induced fluorescence and Langmuir probe determination of Cl2+ and Cl+ absolute densities in transformer-coupled chlorine plasmas by Malyshev, M. V., Fuller, N. C. M., Bogart, K. H. A., Donnelly, V. M., Herman, Irving P.

    Published in Applied physics letters (22-03-1999)
    “…Laser induced fluorescence detection of Cl2+ has been used to track their relative concentration in a high-density inductively (transformer) coupled (TCP) 10…”
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    Journal Article