Search Results - "Malhaire, Christophe"
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Piezo-tunneling strain sensors integrated on plastic by combining vacuum thin film coatings and 3D printing technologies
Published in Microsystem technologies : sensors, actuators, systems integration (01-12-2020)“…There is a growing demand for the integration of sensor functions on flexible substrates for wearable electronics, robotics or medical monitoring. For this, it…”
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2
Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
Published in Applied physics letters (20-03-2017)“…Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electro-mechanical…”
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3
All-organic electrostrictive polymer composites with low driving electrical voltages for micro-fluidic pump applications
Published in Scientific reports (03-07-2015)“…This paper focuses on the improvement of a relaxor ferroelectric terpolymer, i.e., poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene)…”
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4
Ultrahigh Sensitivity to Strain of Cracked Thin Films Based on Metallic Nanoparticles in a Dielectric Matrix
Published in IEEE sensors letters (01-09-2018)“…Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electromechanical response…”
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5
Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches
Published in Microsystem technologies : sensors, actuators, systems integration (01-01-2015)“…Micro-electro-mechanical-system (MEMS) switches are very interesting for high frequency applications. These switches are electrostatically actuated…”
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6
On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films
Published in Microsystem technologies : sensors, actuators, systems integration (01-09-2009)“…In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to…”
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Mechanical cross-characterization of sputtered inconel thin films for MEMS applications
Published in Sensors and actuators. B, Chemical (20-09-2007)“…The characterization of Young's modulus, Poisson's ratio, linear coefficient of thermal expansion and residual stress of thin films is a critical issue for the…”
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A Systematic Error in the Internal Friction Measurement of Coatings for Gravitational Waves Detectors
Published 12-09-2022“…Low internal friction coatings are key components of advanced technologies such as optical atomic clocks and high-finesse optical cavity and often lie at the…”
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Long-Term Stability of Metal Lines, Polysilicon Gauges, and Ohmic Contacts for Harsh-Environment Pressure Sensors
Published in IEEE sensors journal (01-12-2006)“…This paper presents a study on the long-term stability of AlTi (with a TiW diffusion barrier) metal lines, polysilicon gauges, and metal on polysilicon…”
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10
Design of bossed silicon membranes for high sensitivity microphone applications
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Conference Proceeding Journal Article -
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Portable device integrating an ultrasensitive mechanical crack-based sensor for the wireless monitoring of cardiac activity
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01-06-2020)“…Flexible crack-based strain sensors showing a maximum gauge factor of 30,000 at 0.2% strain level are elaborated by means of Atomic Layer Deposition and e-beam…”
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Conference Proceeding -
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Influence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin films
Published in EPJ Web of conferences (01-01-2010)“…Mechanical properties of freestanding electroplated gold thin films were studied in relationship to their geometrical and microstructural properties. Three…”
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13
Nanoindentation experiments with small tip radii: an experimental method
Published in 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) (01-05-2010)“…Nanoindentation experiments were performed with spherical tip radii on one ceramic and three metals. The resulting Young's modulus appears to be lower than…”
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Conference Proceeding -
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Realization of Thin Film Specimens for Micro Tensile Tests
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2007)“…This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system…”
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Conference Proceeding