Search Results - "Maher, Dennis M."

Direct observations and analyses of dislocation substructures in the α phase of an α/β Ti-alloy formed by nanoindentation by Viswanathan, G.B., Lee, Eunha, Maher, Dennis M., Banerjee, S., Fraser, Hamish L.

“…The hardness of α-titanium grains as a function of both indentation depth and orientation has been assessed using nanoindentation. Direct observations and…”
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Complementary techniques for the characterization of thin film Ti/Nb multilayers by Genç, Arda, Banerjee, Rajarshi, Thompson, Gregory B., Maher, Dennis M., Johnson, Andrew W., Fraser, Hamish L.

“…An aberration corrector on the probe-forming lens of a scanning TEM (STEM) equipped with an electron energy-loss spectrometer (EELS) and X-ray…”
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Direct observations of dislocation substructures formed by nano-indentation of the α-phase in an α/β titanium alloy by Viswanathan, G.B., Lee, Eunha, Maher, Dennis M., Banerjee, Srikumar, Fraser, Hamish L.

“…Nano-indentation has been used to assess the hardness of equiaxed grains of α-Ti as a function of orientation. Surface normals of these grains in…”
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Low temperature selective silicon epitaxy by ultra high vacuum rapid thermal chemical vapor deposition using Si2H6, H2 and Cl2 by Violette, Katherine E., O’Neil, Patricia A., Öztürk, Mehmet C., Christensen, Kim, Maher, Dennis M.

“…We present the use of the Si2H6/H2/CL2 chemistry for selective silicon epitaxy by rapid thermal chemical vapor deposition (RTCVD). The experiments were carried…”
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Characterization of structure/dopant behavior by electron microscopy by Maher, Dennis M., Zhang, Bojun

“…Transmission electron microscopy analyses that result in a quantitative characterization of structure/dopant behavior at the nanometer scale are the focus of…”
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Inner-Shell Electron Spectroscopy for Microanalysis: Chemical, structural, and electronic data are obtained by analysis of electron energy losses by Joy, David C., Maher, Dennis M.

“…The transmission electron energy-loss spectrum shows characteristic "edges" corresponding to the excitation of inner-shell electrons of atoms in a thin sample…”
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The formation and interpretation of defect images from crystalline materials in a scanning transmission electron microscope by Maher, D M, Joy, D C

“…The technique of scanning transmission electron microscopy (STEM) has been employed usefully in studies of amorphous materials, and the theory of image…”
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Inner-Shell Electron Spectroscopy for Microanalysis by Joy, David C., Maher, Dennis M.

“…The transmission electron energy-loss spectrum shows characteristic "edges" corresponding to the excitation of inner-shell electrons of atoms in a thin sample…”
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Factors affecting two-dimensional dopant profiles obtained by transmission electron microscopy of etched p-n junctions in Si by Neogi, Suneeta S., Venables, David, Na, Zhiyong, Maher, Dennis M.

“…Transmission electron microscopy (TEM) was used to characterize image contrast obtained from doping-dependent etching of p-n junctions in silicon. The local…”
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Direct observations of dislocation substructures formed by nano-indentation of the α-phase in an α/β titanium alloy by VISWANATHAN, G. B, LEE, Eunha, MAHER, Dennis M, BANERJEE, Srikumar, FRASER, Hamish L

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Low thermal budget in   situ removal of oxygen and carbon on silicon for silicon epitaxy in an ultrahigh vacuum rapid thermal chemical vapor deposition reactor by Sanganeria, Mahesh K., Öztürk, Mehmet C., Violette, Katherine E., Harris, Gari, Lee, C. Archie, Maher, Dennis M.

“…In this letter, we present experimental evidence on desorption of O and C from a Si surface resulting in impurity levels below the detection levels of…”
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Effects of carbon implantation on generation lifetime in silicon by Ban, Ibrahim, Öztürk, Mehmet C., Christensen, Kim, Maher, Dennis M.

“…In this study, we present characterization of metal–oxide–silicon (MOS) capacitors fabricated on carbon (C12) implanted Si substrates. Carbon was implanted at…”
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Effects of oxygen on selective silicon deposition using disilane by O'Neil, Patricia A., Öztürk, Mehmet C., Batchelor, Alan D., Maher, Dennis M.

“…Using Si 2H 6 in an ultrahigh vacuum rapid thermal chemical vapor deposition reactor, we have investigated the role of high levels of oxygen (>5×10 −6 Torr)…”
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Smooth amorphous silicon deposition on silicon dioxide with high deposition rates by rapid thermal chemical vapor deposition using disilane by Violette, Katherine E., Öztürk, Mehmet C., Christensen, Kim, Maher, Dennis M.

“…In this paper, we report amorphous silicon (α-Si) deposition on SiO 2 by rapid thermal chemical vapor deposition for the first time at rates compatible with…”
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Influence of dry and wet cleaning on the properties of rapid thermal grown and deposited gate dielectrics by XIAOLI XU, KUEHN, R. T, ÖZTÜRK, M. C, WORTMAN, J. J, NEMANICH, R. J, HARRIS, G. S, MAHER, D. M

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Fluorinated Molecule as a Tracer: Difluoroserotonin in Human Platelets Mapped by Electron Energy-Loss Spectroscopy by Costa, Jonathan L., Joy, David C., Maher, Dennis M., Kirk, Kenneth L., Hui, S. W.

“…The intracellular distribution of fluorine has been delineated in human platelets incubated with 4,6-difluoroserotonin, utilizing a scanning-transmission…”
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Deposition and characterization of polysilicon films deposited by rapid thermal processing by Ren, Xiaowei, Öztürk, Mehmet C., Wortman, Jimmie J., Zhang, Bojun, Maher, Dennis M., Batchelor, Dale

“…Low‐pressure chemical vapor deposition (LPCVD) of polycrystalline silicon in a cold‐wall, lamp‐heated, rapid‐thermal processor was investigated. Blanket…”
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