Search Results - "MEHRAN MEHREGANY"

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    A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications by Azevedo, R.G., Jones, D.G., Jog, A.V., Jamshidi, B., Myers, D.R., Li Chen, Xiao-an Fu, Mehregany, M., Wijesundara, M.B.J., Pisano, A.P.

    Published in IEEE sensors journal (01-04-2007)
    “…In this paper, we present a silicon carbide MEMS resonant strain sensor for harsh environment applications. The sensor is a balanced-mass double-ended tuning…”
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    Journal Article
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    Extreme temperature 6H-SiC JFET integrated circuit technology by Neudeck, Philip G., Garverick, Steven L., Spry, David J., Chen, Liang-Yu, Beheim, Glenn M., Krasowski, Michael J., Mehregany, Mehran

    “…Extreme temperature semiconductor integrated circuits (ICs) are being developed for use in the hot sections of aircraft engines and other harsh‐environment…”
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    Journal Article
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    550 ^\hbox Integrated Logic Circuits using 6H-SiC JFETs by Chia-Wei Soong, Patil, A. C., Garverick, S. L., Xiaoan Fu, Mehregany, M.

    Published in IEEE electron device letters (01-10-2012)
    “…This letter reports the design, fabrication, and electrical characteristics of inverter, NAND, and NOR logic circuits using 6H-silicon carbide (SiC)…”
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    Journal Article
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    Celebrating the legacy of Wen H. Ko (1923–2017) by Mehregany, Mehran

    Published in Sensors and actuators. A. Physical. (01-07-2018)
    “…An obituary for Professor Wen H. Ko, who died on Dec 4, 2017, is presented. Ko came to Case Western Reserve University in 1954 as an engineering MS student and…”
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    Journal Article
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    Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition by Fu, Xiao-an, Dunning, Jeremy L., Zorman, Christian A., Mehregany, Mehran

    Published in Thin solid films (01-12-2005)
    “…Residual stress and in-plane biaxial modulus of polycrystalline 3C-silicon carbide (poly-SiC) films are studied using bulk and surface micromachined…”
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    Journal Article
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    Fully-monolithic, 600°C differential amplifiers in 6H-SiC JFET IC technology by Patil, A.C., Xiao-an Fu, Mehregany, M., Garverick, S.L.

    “…A family of fully-integrated differential amplifiers was designed and fabricated in 6H-SiC, n-channel JFET integrated-circuit technology. A single-stage…”
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    Conference Proceeding
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    Electromechanical computing at 500 degrees C with silicon carbide by Lee, Te-Hao, Bhunia, Swarup, Mehregany, Mehran

    “…Logic circuits capable of operating at high temperatures can alleviate expensive heat-sinking and thermal-management requirements of modern electronics and are…”
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    Journal Article
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    A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement by Chen, Li, Mehregany, Mehran

    Published in Sensors and actuators. A. Physical. (01-07-2008)
    “…This paper reports a research prototype of a low-cost, miniature, mass-producible sensor for measurement of high-pressure at operating temperatures of…”
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    Journal Article
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    Electromechanical Computing at 500°C with Silicon Carbide by Lee, Te-Hao, Bhunia, Swarup, Mehregany, Mehran

    “…Logic circuits capable of operating at high temperatures can alleviate expensive heat-sinking and thermal-management requirements of modern electronics and are…”
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    Journal Article
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    Mechanical properties of 3C silicon carbide by Tong, Lijun, Mehregany, Mehran, Matus, Lawrence G.

    Published in Applied physics letters (15-06-1992)
    “…The residual stress and Young's modulus of 3C silicon carbide (SiC) epitaxial films deposited on silicon substrates were measured by load-deflection…”
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    Journal Article
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    Surface-micromachined RF MEMs switches on GaAs substrates by Hyman, Daniel, Lam, Juan, Warneke, Brett, Schmitz, Adele, Hsu, T. Y., Brown, Julia, Schaffner, James, Walston, Andy, Loo, Robert Y., Mehregany, Mehran, Lee, Jae

    “…This paper reports on the development of a broadband, low insertion loss, ohmic‐contact MEMs switch for microwave and millimeter‐wave applications. The switch…”
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    Journal Article
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    PRINCIPLES TO GUIDE LEADERSHIP TRAINING by Mehregany, Mehran, Wnek, Gary E

    Published in ASEE prism (01-07-2019)
    “…Mehregany and Wnek offer three guiding principles for leadership training, drawn from their own career experiences in business, academia, and nonprofit…”
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    Journal Article
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    Thick PECVD silicon dioxide films for MEMS devices by Ho, Shih-Shian, Rajgopal, Srihari, Mehregany, Mehran

    Published in Sensors and actuators. A. Physical. (01-04-2016)
    “…•5μm-thick TEOS silicon dioxide films were developed for MEMS devices.•Two-way analysis of variance (ANOVA) verifies that the experimental data are valid.•The…”
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    Journal Article
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    Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates by Davis, Robert F., Gehrke, Thomas, Linthicum, Kevin J., Zheleva, Tsvetanka S., Rajagopal, Pradeep, Zorman, Chris A., Mehregany, Mehran

    “…Monocrystalline GaN and Al Ga N films have been grown via the pendeo-epitaxy (PE) [ ] technique with and without Si masks on GaN/AlN/6H–SiC(0001) and…”
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    Journal Article
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    Media compatible stainless steel capacitive pressure sensors by Ho, Shih-Shian, Rajgopal, Srihari, Mehregany, Mehran

    Published in Sensors and actuators. A. Physical. (15-01-2013)
    “…Self-packaged stainless steel (SS) capacitive pressure sensors are developed and studied for their harsh environment performance, i.e., measurements of…”
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    Journal Article
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    Theoretical modeling of microfabricated beams with elastically restrained supports by Qingyuan Meng, Mehregany, M., Mullen, R.L.

    Published in Journal of microelectromechanical systems (01-09-1993)
    “…A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model…”
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    Journal Article