Search Results - "MEHRAN MEHREGANY"
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A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications
Published in IEEE sensors journal (01-04-2007)“…In this paper, we present a silicon carbide MEMS resonant strain sensor for harsh environment applications. The sensor is a balanced-mass double-ended tuning…”
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2
Extreme temperature 6H-SiC JFET integrated circuit technology
Published in Physica status solidi. A, Applications and materials science (01-10-2009)“…Extreme temperature semiconductor integrated circuits (ICs) are being developed for use in the hot sections of aircraft engines and other harsh‐environment…”
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3
SiC MEMS: opportunities and challenges for applications in harsh environments
Published in Thin solid films (01-11-1999)Get full text
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4
550 ^\hbox Integrated Logic Circuits using 6H-SiC JFETs
Published in IEEE electron device letters (01-10-2012)“…This letter reports the design, fabrication, and electrical characteristics of inverter, NAND, and NOR logic circuits using 6H-silicon carbide (SiC)…”
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5
Celebrating the legacy of Wen H. Ko (1923–2017)
Published in Sensors and actuators. A. Physical. (01-07-2018)“…An obituary for Professor Wen H. Ko, who died on Dec 4, 2017, is presented. Ko came to Case Western Reserve University in 1954 as an engineering MS student and…”
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Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition
Published in Thin solid films (01-12-2005)“…Residual stress and in-plane biaxial modulus of polycrystalline 3C-silicon carbide (poly-SiC) films are studied using bulk and surface micromachined…”
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7
Fully-monolithic, 600°C differential amplifiers in 6H-SiC JFET IC technology
Published in 2009 IEEE Custom Integrated Circuits Conference (01-09-2009)“…A family of fully-integrated differential amplifiers was designed and fabricated in 6H-SiC, n-channel JFET integrated-circuit technology. A single-stage…”
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Conference Proceeding -
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Electromechanical computing at 500 degrees C with silicon carbide
Published in Science (American Association for the Advancement of Science) (10-09-2010)“…Logic circuits capable of operating at high temperatures can alleviate expensive heat-sinking and thermal-management requirements of modern electronics and are…”
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9
A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement
Published in Sensors and actuators. A. Physical. (01-07-2008)“…This paper reports a research prototype of a low-cost, miniature, mass-producible sensor for measurement of high-pressure at operating temperatures of…”
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10
Electromechanical Computing at 500°C with Silicon Carbide
Published in Science (American Association for the Advancement of Science) (10-09-2010)“…Logic circuits capable of operating at high temperatures can alleviate expensive heat-sinking and thermal-management requirements of modern electronics and are…”
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11
Mechanical properties of 3C silicon carbide
Published in Applied physics letters (15-06-1992)“…The residual stress and Young's modulus of 3C silicon carbide (SiC) epitaxial films deposited on silicon substrates were measured by load-deflection…”
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12
Embedded two-phase cooling of high heat flux electronics on silicon carbide (SiC) using thin-film evaporation and an enhanced delivery system (FEEDS) manifold-microchannel cooler
Published in 2017 16th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) (01-05-2017)“…This work presents experimental results of a two-phase, embedded cooling system for high heat flux electronics on silicon carbide (SiC) substrates. The system…”
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Conference Proceeding -
13
Surface-micromachined RF MEMs switches on GaAs substrates
Published in International journal of RF and microwave computer-aided engineering (01-07-1999)“…This paper reports on the development of a broadband, low insertion loss, ohmic‐contact MEMs switch for microwave and millimeter‐wave applications. The switch…”
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14
LAST WORD: PRINCIPLES TO GUIDE LEADERSHIP TRAINING
Published in ASEE prism (01-07-2019)Get full text
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PRINCIPLES TO GUIDE LEADERSHIP TRAINING
Published in ASEE prism (01-07-2019)“…Mehregany and Wnek offer three guiding principles for leadership training, drawn from their own career experiences in business, academia, and nonprofit…”
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16
Thick PECVD silicon dioxide films for MEMS devices
Published in Sensors and actuators. A. Physical. (01-04-2016)“…•5μm-thick TEOS silicon dioxide films were developed for MEMS devices.•Two-way analysis of variance (ANOVA) verifies that the experimental data are valid.•The…”
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17
Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films
Published in Applied physics letters (27-07-1987)Get full text
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Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates
Published in International journal of materials research (22-12-2021)“…Monocrystalline GaN and Al Ga N films have been grown via the pendeo-epitaxy (PE) [ ] technique with and without Si masks on GaN/AlN/6H–SiC(0001) and…”
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19
Media compatible stainless steel capacitive pressure sensors
Published in Sensors and actuators. A. Physical. (15-01-2013)“…Self-packaged stainless steel (SS) capacitive pressure sensors are developed and studied for their harsh environment performance, i.e., measurements of…”
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20
Theoretical modeling of microfabricated beams with elastically restrained supports
Published in Journal of microelectromechanical systems (01-09-1993)“…A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model…”
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