Search Results - "MANNY, M. P"
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Lithography and fabrication processes for sub‐100 nm scale complementary metal–oxide semiconductor
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1995)“…We explore the fabrication of complementary metal–oxide–semiconductor (CMOS) devices and circuits with a critical dimension of 100 nm and below using a variety…”
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Conference Proceeding -
2
Sub-μm linewidth input coils for low Tc integrated thin-film dc superconducting quantum interference devices
Published in Applied physics letters (1992)Get full text
Journal Article -
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Sub-μm linewidth input coils for low T c integrated thin-film dc superconducting quantum interference devices
Published in Applied physics letters (20-07-1992)“…We have, for the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 μm. The…”
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Journal Article -
4
Sub-micron linewidth input coils for low Tc integrated thin-film dc superconducting quantum interference devices
Published in Applied physics letters (20-07-1992)“…For the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 micron were…”
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Journal Article -
5
SiGe-base PNP transistors fabricated with n-type UHV/CVD LTE in a `No Dt' process
Published in Digest of Technical Papers.1990 Symposium on VLSI Technology (1990)“…Experimental results are presented on the use of N-type ultrahigh-vacuum/chemical vapor deposition (UHV/CVD) low-temperature epitaxy (LTE) to deposit thin (45…”
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Conference Proceeding -
6
Characteristics of vertical p-channel MOSFETs for high density circuit application
Published in 1991 International Symposium on VLSI Technology, Systems, and Applications - Proceedings of Technical Papers (1991)“…Vertical p-channel MOSFETs have been experimentally fabricated and characterized. Device characteristics of vertical p-channel MOSFETs are comparable to those…”
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Conference Proceeding