Search Results - "Lyytinen, Jussi"
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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Published in Thin solid films (03-02-2014)“…Use of atomic layer deposition (ALD) in microelectromechanical systems (MEMS) has increased as ALD enables conformal growth on 3-dimensional structures at…”
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Journal Article -
2
Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures
Published in Colloids and surfaces. A, Physicochemical and engineering aspects (05-10-2013)“…•Abrasion resistant fluoropolymer surfaces.•Alumina slurry abrasion testing.•Single and dual scale CYTOP micro/nanostructures.•Cassie state retained after 4h…”
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Journal Article -
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Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate
Published in Wear (15-11-2015)“…For every coating it is critical that the coatings are sufficiently durable to withstand practical applications and that the films adhere well enough to the…”
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Journal Article -
4
Characterization of thin film adhesion by MEMS shaft-loading blister testing
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2013)“…A new microelectromechanical system shaft-loaded blister test was developed and demonstrated to provide stability, repeatability, and simultaneous quantitative…”
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Journal Article -
5
Carbon thin films as electrode material in neural sensing
Published in Surface & coatings technology (25-11-2014)“…For therapeutic purposes, an accurate measurement of dopamine levels in situ would be highly desirable. A novel strategy for the selective determination of…”
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Journal Article Conference Proceeding -
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Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-01-2017)“…Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas–solid reactions, has become the method of…”
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Book Review Journal Article -
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Recommended reading list of early publications on atomic layer deposition-Outcome of the "Virtual Project on the History of ALD"
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (2017)“…Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of…”
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Journal Article -
8
Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2014)“…In this paper, the authors present a new adhesion test method, which is under development, to study the interfacial mechanical parameters of atomic layer…”
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Journal Article -
9
Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO sub(2) on a silicon substrate
Published in Wear (15-11-2015)“…For every coating it is critical that the coatings are sufficiently durable to withstand practical applications and that the films adhere well enough to the…”
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Journal Article -
10
Characterization of nano-coated micro- and nanostructures by pushing
Published in 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) (01-10-2014)“…In this paper, we present methodology for measuring mechanical properties of nano-coated micro- and nanostructures by pushing. The methods are demonstrated in…”
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Conference Proceeding