Search Results - "Lukianov, Anatolii N."

Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD by Lukianov, Anatolii N., Klyui, Nickolai I., Sha, Bo, Lozinskii, Volodymyr B., Temchenko, Volodymyr P., Avksentyeva, Liubov V., Staschuk, Vasyl S.

“…We studied optical and mechanical properties of a-SixC1-x:H films prepared by the PECVD technique from the mixture of CH4, SiH4, H2 and Ar. RF discharge power…”
Get full text

Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range by Sha, Bo, Lukianov, Anatolii N., Dusheiko, Mykhailo G., Lozinskii, Volodymyr B., Klyui, Andriy N., Korbutyak, Dmytro V., Pritchin, Sergey E., Klyui, NickolaiI

“…In the work we demonstrated the possibility to apply amorphous non-stoichiometric silicon carbide (a-SixC1-x:H) and silicon carbonitride (a-SixC1-x-yNy:H)…”
Get full text