Search Results - "Lucovsky, G"
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Application of bond constraint theory to the switchable optical memory material Ge2Sb2Te5
Published in Physical review letters (30-06-2006)“…A new extended x-ray-absorption fine structure spectroscopy study of local bonding identifies for the first time significant concentrations of Ge-Ge bonds in…”
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Self-organization and the physics of glassy networks
Published in Philosophical magazine (Abingdon, England) (11-11-2005)“…Network glasses are the physical prototype for many self-organized systems, ranging from proteins to computer science. Conventional theories of gases, liquids…”
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Microscopic model for enhanced dielectric constants in low concentration SiO2-rich noncrystalline Zr and Hf silicate alloys
Published in Applied physics letters (30-10-2000)“…Dielectric constants, k, of Zr(Hf) silicate alloy gate dielectrics obtained from analysis of capacitance–voltage curves of metal–oxide–semiconductor capacitors…”
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First demonstration of device-quality symmetric N-MOS and P-MOS capacitors on p-type and n-type crystalline Ge substrates
Published in Microelectronic engineering (01-09-2013)“…•Ge interface nitride passivation.•Si passivation layer thickness.•SiON surface on Si passivation layer.•Anneal to eliminate Ge–N bonds.•Symmetric NMOS and…”
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Process-dependent band structure changes of transition-metal (Ti,Zr,Hf) oxides on Si (100)
Published in Applied physics letters (26-01-2004)“…In this study, we have deposited Ti, Zr, and Hf oxides on ultrathin (∼0.5 nm) SiO2 buffer layers and have identified metastable states which give rise to large…”
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Remote plasma-processing (RPP), medium range order, and precursor sites for dangling bond defects in “amorphous-Si(H)” alloys: Photovoltaic and thin film transistor devices
Published in Surface & coatings technology (15-03-2014)“…Remote plasma processing (RPP) provides pathways to the formation of photovoltaic (PV) and thin-film-transistor (TFT) devices that include buried interfaces…”
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Band alignment between (100)Si and complex rare earth∕transition metal oxides
Published in Applied physics letters (13-12-2004)“…The electron energy band alignment between (100)Si and several complex transition∕rare earth (RE) metal oxides (LaScO3, GdScO3, DyScO3, and LaAlO3, all in…”
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Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon
Published in Applied physics letters (07-06-2004)“…Amorphous LaAlO3 thin films have been deposited by molecular beam deposition directly on silicon without detectable oxidation of the underlying substrate. We…”
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Correlations between electronic structure of transition metal atoms and performance of high-k gate dielectrics in advanced Si devices
Published in Journal of non-crystalline solids (01-05-2002)“…This paper develops a classification scheme for non-crystalline dielectrics that separates them into three groups with different amorphous morphologies, and…”
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Journal Article Conference Proceeding -
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Elimination of GeO2 and Ge3N4 interfacial transition regions and defects at n-type Ge interfaces : A pathway for formation of n-MOS devices on Ge substrates
Published in Applied surface science (30-09-2008)“…The contribution from relatively low-K SiON interfacial transition regions (ITRs) between Si and transition metal (TM) gate dielectrics places a significant…”
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Conference Proceeding Journal Article -
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Radiation effects in new materials for nano-devices
Published in Microelectronic engineering (01-07-2011)“…Introduction of new materials and device structures has a significant impact on radiation response. For some devices, the response may be dominated by the…”
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Journal Article Conference Proceeding -
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Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics
Published in Applied physics letters (05-04-1999)“…An increasingly important issue in semiconductor device physics is understanding of how departures from ideal bonding at silicon–dielectric interfaces generate…”
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O-vacancies in transition metal (TM) oxides: Coordination and local site symmetry of transition and negative ion states in TM2O3 and TMO2 oxides
Published in Microelectronic engineering (01-07-2011)Get full text
Conference Proceeding Journal Article -
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Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-07-2002)“…The local bonding of Zr, Si, and O atoms in plasma-deposited, and post-deposition annealed Zr silicate pseudobinary alloys [( ZrO 2 ) x ( SiO 2 ) 1−x ] was…”
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Conference Proceeding -
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Atomic structure and thermal stability of silicon suboxides in bulk thin films and in transition regions at Si–SiO2 interfaces
Published in Journal of non-crystalline solids (01-05-1998)“…This paper treats three aspects of silicon suboxides, SiOx, x<2: (i) the local atomic structure in lightly-hydrogenated low-temperature plasma-deposited SiOx:H…”
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Nitrogen bonding, stability, and transport in AlON films on Si
Published in Applied physics letters (14-06-2004)“…The chemical environment of N in nitrided aluminum oxide films on Si(001) was investigated by angle-resolved x-ray photoelectron spectroscopy. Two different…”
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Multipactor Coating for Sapphire RF Windows Using Remote Plasma-Assisted Deposition
Published in IEEE transactions on plasma science (01-08-2015)“…Traditional application of multipactor coatings applied with sputtering techniques to high-power RF windows typically performs well when applied to sintered…”
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Spectroscopic characterization of high k dielectrics: Applications to interface electronic structure and stability against chemical phase separation
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-07-2004)“…Extensive spectroscopic characterization of high k materials under consideration for replacing Si oxide as the gate dielectric in Si-based microelectronic…”
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Conference Proceeding Journal Article -
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Microscopic bonding and macroscopic strain relaxations at Si-SiO 2 interfaces
Published in Applied physics. A, Materials science & processing (01-03-2004)Get full text
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