Thick CVD diamond films grown on high-quality type IIa HPHT diamond substrates from New Diamond Technology

The suitability of type IIa diamonds prepared by High Pressure High Temperature (HPHT) in cubic presses at New Diamond Technology was assessed as substrates for the growth of thick detector-grade quality Chemically Vapour Deposited (CVD) diamond films. The substrates were found to possess a moderate...

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Bibliographic Details
Published in:	Diamond and related materials Vol. 77; pp. 146 - 152
Main Authors:	Tallaire, A., Mille, V., Brinza, O., Tran Thi, Thu Nhi, Brom, J.M., Loguinov, Y., Katrusha, A., Koliadin, A., Achard, J.
Format:	Journal Article
Language:	English
Published:	Amsterdam Elsevier B.V 01-08-2017 Elsevier BV Elsevier
Subjects:	Crystal defects Diamond films Diamonds Dislocation density Engineering Sciences High temperature Quality Seeds Studies Substrates Technology assessment Thick films
Online Access:	Get full text
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Summary:	The suitability of type IIa diamonds prepared by High Pressure High Temperature (HPHT) in cubic presses at New Diamond Technology was assessed as substrates for the growth of thick detector-grade quality Chemically Vapour Deposited (CVD) diamond films. The substrates were found to possess a moderate dislocation density of about 103cm−2 and a reduced amount of residual impurities as compared to standard type Ib crystals. Using these diamonds as seeds for homoepitaxial growth, CVD films with improved structural characteristics were obtained although extended defects could not be completely prevented from forming and propagating. Their performance as detectors for β radiation was however improved leading to almost full charge collection which shows significant improvement as compared to CVD films grown under the same conditions on standard Ib HPHT diamonds. The availability of this new material source opens the way to the fabrication of higher quality CVD material for electronics applications. [Display omitted] •Thick intrinsic CVD films are grown and retrieved from type IIa diamond substrates.•NDT's type IIa substrates have reduced impurity content and dislocation densities.•CVD films grown on NDT substrates show improved characteristics as compared to standard material.•A thick freestanding CVD plate with almost 100% charge collection efficiency is demonstrated.
ISSN:	0925-9635 1879-0062
DOI:	10.1016/j.diamond.2017.07.002