Search Results - "Lishan, D.G."

Cl sub 2 and HCl radical beam etching of GaAs and InP by Lishan, D.G., Hu, E.L.

“…Both the thermally activated and remote plasma activated etching reactions between Cl{sub 2} and HCl gases and GaAs and InP substrates are characterized…”
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Remote plasma etching of InP in Cl2 and HCl by Lishan, D.G., Hu, E.L.

“…An attempt is made to add insight into the expectation that in the dry etching of InP, increased temperatures should assist etching even in ion enhanced…”
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High-frequency electrooptic Fabry-Perot modulators by Simes, R.J., Yan, R.H., Barron, C.C., Derrickson, D., Lishan, D.G., Karin, J., Coldren, L.A., Rodwell, M., Elliot, S., Hughes, B.

“…Electrooptic modulators built from GaAs/Al/sub x/Ga/sub 1-x/As Fabry-Perot cavities operating up to 6.5 GHz are reported. The measured frequency response…”
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Overtone vibrational photochemistry of quadricyclane by Lishan, David G, Reddy, K. V, Hammond, George S, Leonard, Jack E

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Investigation of reactive ion etching induced damage in GaAs–AlGaAs quantum well structures by Wong, H. F., Green, D. L., Liu, T. Y., Lishan, D. G., Bellis, M., Hu, E. L., Petroff, P. M., Holtz, P. O., Merz, J. L.

“…We report on the use of a novel technique to study reactive ion etching (RIE) induced damage using multiple quantum wells of 20‐, 40‐, 60‐, and 90‐Å widths as…”
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