Search Results - "Lima, L.P.B."
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Titanium nitride as electrode for MOS technology and Schottky diode: Alternative extraction method of titanium nitride work function
Published in Microelectronic engineering (01-04-2012)“…Titanium nitride (TiN) films have been used as gate electrodes in metal–oxide-semiconductor (MOS) capacitors, which were fabricated with SiO2 layer as gate…”
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Journal Article Conference Proceeding -
2
Monolithic Complementary Field Effect Transistors (CFET) Demonstrated using Middle Dielectric Isolation and Stacked Contacts
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16-06-2024)“…This work reports on the first demonstration of monolithic CFET CMOS co-integrating Middle Dielectric Isolation (MDI), Inner Spacers (ISP) and Stacked…”
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Conference Proceeding -
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TiN/titanium–aluminum oxynitride/Si as new gate structure for 3D MOS technology
Published in Microelectronic engineering (01-04-2012)“…3D MOS capacitors with Al/TAON/Si (as control sample) and TiN/TAON/Si gate structures for 3D technology were fabricated. Focus Ion Beam (FIB) thinning process:…”
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Journal Article Conference Proceeding