Search Results - "Lima, L.P.B."

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    Titanium nitride as electrode for MOS technology and Schottky diode: Alternative extraction method of titanium nitride work function by Lima, L.P.B., Diniz, J.A., Doi, I., Godoy Fo, J.

    Published in Microelectronic engineering (01-04-2012)
    “…Titanium nitride (TiN) films have been used as gate electrodes in metal–oxide-semiconductor (MOS) capacitors, which were fabricated with SiO2 layer as gate…”
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    Journal Article Conference Proceeding
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    TiN/titanium–aluminum oxynitride/Si as new gate structure for 3D MOS technology by Miyoshi, J., Lima, L.P.B., Diniz, J.A., Cavarsan, F.A., Doi, I., Godoy Filho, J., Silva, A.R.

    Published in Microelectronic engineering (01-04-2012)
    “…3D MOS capacitors with Al/TAON/Si (as control sample) and TiN/TAON/Si gate structures for 3D technology were fabricated. Focus Ion Beam (FIB) thinning process:…”
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    Journal Article Conference Proceeding