Search Results - "Lieberman, M.A."

From Fermi acceleration to collisionless discharge heating by Lieberman, M.A., Godyak, V.A.

“…The heating of electrons by time-varying fields is fundamental to the operation of radio frequency (RF) and microwave discharges. Ohmic heating, in which the…”
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Analytical solution for capacitive RF sheath by Lieberman, M.A.

“…A self-consistent solution for the dynamics of a high voltage, capacitive radio frequency (RF) sheath driven by a sinusoidal current source is obtained under…”
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Dynamics of a collisional, capacitive RF sheath by Lieberman, M.A.

“…A self-consistent solution for the dynamics of a high-voltage, capacitive RF sheath driven by a sinusoidal current source is obtained, under the assumptions of…”
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Hydrogenation of polysilicon thin-film transistor in a planar inductive H/sub 2//Ar discharge by Ching-Fa Yeh, Tai-Ju Chen, Chung Liu, Gudmundsson, J.T., Lieberman, M.A.

“…A planar inductive discharge is used to hydrogenate polysilicon thin-film transistors (poly-Si TFTs). Experimental results indicate that inductive discharges…”
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Nonlinearity And Waves In Capacitively-Coupled Plasma Processing Discharges by Lieberman, M.A., Lichtenberg, A. J., Kawamura, E.

“…Capacitively-coupled plasmas (CCP's) are widely used at low pressures for thin film etching on silicon substrates and, at higher pressures, for film deposition…”
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Model of magnetically enhanced, capacitive RF discharges by Lieberman, M.A., Lichtenberg, A.J., Savas, S.E.

“…Magnetically enhanced, capacitive RF discharges (called RF magnetrons or MERIE discharges) are playing an increasing role in thin film etching for integrated…”
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Sheath motion in a capacitively coupled radio frequency discharge by Wood, B.P., Lieberman, M.A., Lichtenberg, A.J.

“…The sheath motion in a capacitively coupled RF discharge is highly nonlinear. The voltage waveform on a cylindrical probe placed in the sheath region is…”
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Spatially averaged (global) model of time modulated high density argon plasmas by Ashida, Sumio, Lee, C., Lieberman, M. A.

“…The behavior of argon plasmas driven by time modulated power in ‘‘high density’’ plasma reactors is investigated using a global model. The time evolution of…”
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The effects of nursing home placement on family caregivers of patients with Alzheimer's disease by LIEBERMAN, M.A, FISHER, L

“…This study sought to determine the effects of nursing home placement (NHP) for patients with Alzheimer's disease, compared to maintaining community placement,…”
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Secure random number generation using chaotic circuits by Bernstein, G.M., Lieberman, M.A.

“…The authors suggest a class of circuits for generating secure pseudo-random numbers and estimate the security of these generators from the information loss…”
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A Longitudinal Study of Predictors of Nursing Home Placement for Patients With Dementia: The Contribution of Family Characteristics by Fisher, Lawrence, Lieberman, Morton A.

“…The caregivers of elderly patients with dementia (N = 164) were followed for 2 years to determine if characteristics of the multigeneration family predicted…”
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Collisional ion energy distribution (IED) model for single frequency capacitive discharges by Ying Wang, Verboncoeur, J.P., Lieberman, M.A.

“…Summary form only given. The distributions of particles on substrate surfaces are very important for materials processing, and it is valuable to develop fast…”
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Reduction of the electrostatic coupling in a large-area internal inductively coupled plasma source using a multicusp magnetic field by Lee, Y. J., Kim, K. N., Yeom, G. Y., Lieberman, M. A.

“…A large area (1020mm×830mm) inductively coupled plasma (ICP) source has been developed using an internal-type linear antenna with permanent magnets forming a…”
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Measurements of pulsed‐power modulated argon plasmas in an inductively coupled plasma source by Ashida, Sumio, Shim, M. R., Lieberman, M. A.

“…The behavior of pulsed‐power (square wave) modulated argon plasmas generated by an inductively coupled plasma (ICP) source is experimentally investigated. The…”
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Double layer formation in a two-region electronegative plasma by Kawamura, E., Lieberman, M.A., Lichtenberg, A.J., Verboncoeur, J.P.

“…Summary form only given. We describe the formation of a double layer (DL) in a two- dimensional (2D) electronegative plasma with a source (heating) section…”
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Nonlinear resonance effects on electron heating in capacitive discharges by Mussenbrock, T., Ziegler, D., Gebhardt, M., Brinkmann, R.P., Lieberman, M.A., Lichtenberg, A.J., Kawamura, E.

“…In capacitive radio frequency discharges operated at gas pressures below 20 mTorr two mechanisms of electron heating play a major role: i) ohmic heating due to…”
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Global model of Ar, O[sub 2], Cl[sub 2], and Ar/O[sub 2] high-density plasma discharges by Lee, C., Lieberman, M.A.

“…We develop a global (volume averaged) model of high-density plasma discharges in molecular gases. For a specified discharge length and diameter, absorbed…”
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Fermi acceleration revisited-from cosmic rays to discharge heating by Lieberman, M.A.

“…Summary form only given, as follows. The motion of a ball bouncing between a fixed and an oscillating wall was originally proposed by Fermi in 1949 as a model…”
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Tooth, face, and skull dimensions in different ethnic groups in Israel by Krzypow, A B, Lieberman, M A, Modan, M

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Global model for high pressure electronegative radio-frequency discharges by Lee, Y. T., Lieberman, M. A., Lichtenberg, A. J., Bose, F., Baltes, H., Patrick, R.

“…We develop a global model for high pressure (0.1–1 Torr) electronegative rf discharges and apply it to model a capacitively driven plasma etcher. The molecular…”
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