Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressur...

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Bibliographic Details
Published in:	Sensors (Basel, Switzerland) Vol. 22; no. 13; p. 4700
Main Authors:	Zhang, Hui, Li, Yi, Zhang, Zhuo, Yang, Chaoming, Liang, Mingshan, Hu, Yong, Wei, Heming, Pang, Fufei
Format:	Journal Article
Language:	English
Published:	Basel MDPI AG 22-06-2022 MDPI
Subjects:	Carbon dioxide lasers CO2 laser welding Communication Electric fields Fabry-Perot interferometers Fabry–Pérot cavity Laser beam welding Lasers Manufacturing Microcavities optical fiber sensor Optical fibers Polymers pressure sensing Pressure sensors Sensors Simulation
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Summary:	A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.
Bibliography:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23
ISSN:	1424-8220 1424-8220
DOI:	10.3390/s22134700