Search Results - "Lhostis, Sandrine"

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    Effect of ion implantation energy for the synthesis of Ge nanocrystals in SiN films with HfO2/SiO2 stack tunnel dielectrics for memory application by Sahu, Bhabani Shankar, Gloux, Florence, Slaoui, Abdelilah, Carrada, Marzia, Muller, Dominique, Groenen, Jesse, Bonafos, Caroline, Lhostis, Sandrine

    Published in Nanoscale research letters (28-02-2011)
    “…Ge nanocrystals (Ge-NCs) embedded in SiN dielectrics with HfO 2 /SiO 2 stack tunnel dielectrics were synthesized by utilizing low-energy (≤5 keV) ion…”
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    Journal Article
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    From Electrical to Physical-Chemical Characterization of the Cu/SiO₂ Hybrid-Bonding Interface-A Cu₂O-Layer as a Cu Diffusion Barrier? by Moreau, Stephane, Manzanarez, Herve, Bernier, Nicolas, Jourdon, Joris, Lhostis, Sandrine, Fremont, Helene

    Published in IEEE electron device letters (01-05-2021)
    “…This letter discusses copper (Cu) diffusion in the framework of the development of future 3D stacked devices by means of hybrid bonding-based interconnects…”
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    Journal Article
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    Search for copper diffusion at hybrid bonding interface through chemical and electrical characterizations by Jourdon, Joris, Lhostis, Sandrine, Moreau, Stéphane, Lamontagne, Patrick, Frémont, Hélène

    Published in Microelectronics and reliability (01-11-2021)
    “…Cu/SiO2 diffusion at hybrid bonding interface without diffusion barrier was investigated in order to validate the electrical insulation of interconnects. The…”
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    Journal Article
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    Investigation into Cu diffusion at the Cu/SiO2 hybrid bonding interface of 3D stacked integrated circuits by Ayoub, Bassel, Lhostis, Sandrine, Moreau, Stéphane, Mattei, Jean-Gabriel, Mukhtarov, Anna, Frémont, Hélène

    Published in Microelectronics and reliability (01-04-2023)
    “…Reliability concerns are often risen for the hybrid bonding integration due to a potential misalignment in the bonding step leading that Cu directly faces…”
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    Journal Article
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    Angular and polarization properties of cross-holes nanostructured metallic filters by Girard-Desprolet, Romain, Boutami, Salim, Lhostis, Sandrine, Vitrant, Guy

    Published in Optics express (02-12-2013)
    “…It has been shown in literature that cross-shaped holes arrays can be made insensitive to polarization at normal incidence, and can even feature good stability…”
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    Journal Article
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    Evaluation of Hybrid Bonding Interface Quality by Contact Resistivity Measurement by Jourdon, Joris, Lhostis, Sandrine, Moreau, Stephane, Bresson, Nicolas, Salome, Pascal, Fremont, Helene

    Published in IEEE transactions on electron devices (01-06-2019)
    “…With the rise of hybrid bonding as a solution for fine pitch 3-D integration, new methods are required to evaluate the bonding quality at a wafer level…”
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    Journal Article
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    In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration by Ayoub, Bassel, Moreau, Stéphane, Lhostis, Sandrine, Frémont, Hélène, Mermoz, Sébastien, Souchier, Emeline, Deloffre, Emilie, Escoubas, Stéphanie, Cornelius, Thomas W., Thomas, Olivier

    Published in Microelectronic engineering (15-05-2022)
    “…Hybrid bonding is a very promising 3D packaging technology which allows extremely high interconnect density between electronic chips. In its most advanced…”
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    Journal Article
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    Correlation Between Electromigration-Related Void Volumes and Time-to-Failure by High Resolution X-Ray Tomography and Modeling by Moreau, Stephane, Fraczkiewicz, Alexandra, Bouchu, David, Bleuet, Pierre, Cloetens, Peter, Cesar Da Silva, Julio, Manzanarez, Herve, Lorut, Frederic, Lhostis, Sandrine

    Published in IEEE electron device letters (01-11-2019)
    “…High resolution synchrotron tomography has demonstrated a proportionality between electromigration induced void volume and time-to-failure in hybrid bonding…”
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    Journal Article
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    Contact Resistivity of Submicron Hybrid Bonding Pads Down to 400 nm by Lhostis, S., Ayoub, B., Sart, C., Moreau, S., Souchier, E., Gusmao Cacho, M. G., Deloffre, E., Mermoz, S., Rey, C., Le Roux, F., Aybeke, E., Gallois-Garreignot, S., Frémont, H., Tournier, A.

    Published in Journal of electronic materials (01-08-2024)
    “…Three-dimensional (3D) stacking using hybrid bonding is the most scalable method for 3D integration. As the hybrid bonding pad width is reduced to adopt a…”
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    Journal Article
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    Impact of process factors on the performance of hole array metallic filters by Girard-Desprolet, Romain, Lhostis, Sandrine, Beylier, Charlotte, Farys, Vincent, Vitrant, Guy, Boutami, Salim

    “…In this work, we evaluate through rigorous coupled-wave analysis simulations the effect of various process-related inaccuracies on plasmonic filters…”
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    Journal Article
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    Thin film characterization by total reflection x-ray fluorescence by Danel, Adrien, Nolot, Emmanuel, Veillerot, Marc, Olivier, Ségolène, Decorps, Tifenn, Calvo-Muñoz, Maria-Luisa, Hartmann, Jean-Michel, Lhostis, Sandrine, Kohno, Hiroshi, Yamagami, Motoyuki, Geoffroy, Charles

    “…Sensitive and accurate characterization of films thinner than a few nm used in nanoelectronics represents a challenge for many conventional production…”
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    Journal Article
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    RC delay mitigation for sub 700 nm hybrid bonding pitch by Lhostis, Sandrine, Ayoub, Bassel, Fremont, Helene, Moreau, Stephane, Mermoz, Sebastien, Deloffre, Emilie, Souchier, Emeline, Cacho, Maria Gabriela Gusmao, Aybeke, Ece, Lamontagne, Patrick, Rey, Christelle, Tournier, Arnaud

    “…Hybrid bonding is one of the most scalable 3D integration methods allowing very high interconnect density. The bonding pitch reduction leads to an increase in…”
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    Conference Proceeding
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    Impact of integrating microchannel cooling within 3D microelectronic packages for portable applications by Collin, Louis-Michel, Frechette, Luc G., Souifi, Abdelkader, Lhostis, Sandrine, de Crecy, Francois, Cheramy, Severine, Colonna, Jean-Philippe, Fiori, Vincent

    “…This work presents the impact of integrating microfluidic channels at different locations in a 3D stacked chip configuration to improve its thermal management…”
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    Conference Proceeding