Search Results - "Lhostis, Sandrine"
-
1
Electrical Behavior of Phase-Change Memory Cells Based on GeTe
Published in IEEE electron device letters (01-05-2010)“…In this letter, we present a study on the electrical behavior of phase-change memories (PCMs) based on a GeTe active material. GeTe PCMs show, first, extremely…”
Get full text
Journal Article -
2
Effect of ion implantation energy for the synthesis of Ge nanocrystals in SiN films with HfO2/SiO2 stack tunnel dielectrics for memory application
Published in Nanoscale research letters (28-02-2011)“…Ge nanocrystals (Ge-NCs) embedded in SiN dielectrics with HfO 2 /SiO 2 stack tunnel dielectrics were synthesized by utilizing low-energy (≤5 keV) ion…”
Get full text
Journal Article -
3
From Electrical to Physical-Chemical Characterization of the Cu/SiO₂ Hybrid-Bonding Interface-A Cu₂O-Layer as a Cu Diffusion Barrier?
Published in IEEE electron device letters (01-05-2021)“…This letter discusses copper (Cu) diffusion in the framework of the development of future 3D stacked devices by means of hybrid bonding-based interconnects…”
Get full text
Journal Article -
4
Search for copper diffusion at hybrid bonding interface through chemical and electrical characterizations
Published in Microelectronics and reliability (01-11-2021)“…Cu/SiO2 diffusion at hybrid bonding interface without diffusion barrier was investigated in order to validate the electrical insulation of interconnects. The…”
Get full text
Journal Article -
5
Investigation into Cu diffusion at the Cu/SiO2 hybrid bonding interface of 3D stacked integrated circuits
Published in Microelectronics and reliability (01-04-2023)“…Reliability concerns are often risen for the hybrid bonding integration due to a potential misalignment in the bonding step leading that Cu directly faces…”
Get full text
Journal Article -
6
Angular and polarization properties of cross-holes nanostructured metallic filters
Published in Optics express (02-12-2013)“…It has been shown in literature that cross-shaped holes arrays can be made insensitive to polarization at normal incidence, and can even feature good stability…”
Get full text
Journal Article -
7
Evaluation of Hybrid Bonding Interface Quality by Contact Resistivity Measurement
Published in IEEE transactions on electron devices (01-06-2019)“…With the rise of hybrid bonding as a solution for fine pitch 3-D integration, new methods are required to evaluate the bonding quality at a wafer level…”
Get full text
Journal Article -
8
Reliability of the hybrid bonding level using submicrometric bonding pads
Published in Microelectronics and reliability (01-11-2023)Get full text
Journal Article -
9
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration
Published in Microelectronic engineering (15-05-2022)“…Hybrid bonding is a very promising 3D packaging technology which allows extremely high interconnect density between electronic chips. In its most advanced…”
Get full text
Journal Article -
10
Theoretical and experimental study of a thermal damper based on a CNT/PCM composite structure for transient electronic cooling
Published in Energy conversion and management (15-06-2017)“…•Two non-dimensional parameters enabling to design an ideal thermal damper are identified.•Latent energy storage capacity of embedded PCM is estimated and…”
Get full text
Journal Article -
11
Correlation Between Electromigration-Related Void Volumes and Time-to-Failure by High Resolution X-Ray Tomography and Modeling
Published in IEEE electron device letters (01-11-2019)“…High resolution synchrotron tomography has demonstrated a proportionality between electromigration induced void volume and time-to-failure in hybrid bonding…”
Get full text
Journal Article -
12
Contact Resistivity of Submicron Hybrid Bonding Pads Down to 400 nm
Published in Journal of electronic materials (01-08-2024)“…Three-dimensional (3D) stacking using hybrid bonding is the most scalable method for 3D integration. As the hybrid bonding pad width is reduced to adopt a…”
Get full text
Journal Article -
13
Cu-SiO2 hybrid bonding simulation including surface roughness and viscoplastic material modeling: A critical comparison of 2D and 3D modeling approach
Published in Microelectronics and reliability (01-07-2018)“…Cu-SiO2 direct hybrid bonding is considered as one of the key enabling technologies for 3D integration. Previous studies showed that the main process…”
Get full text
Journal Article -
14
Impact of process factors on the performance of hole array metallic filters
Published in Applied physics. A, Materials science & processing (01-11-2014)“…In this work, we evaluate through rigorous coupled-wave analysis simulations the effect of various process-related inaccuracies on plasmonic filters…”
Get full text
Journal Article -
15
Thin film characterization by total reflection x-ray fluorescence
Published in Spectrochimica acta. Part B: Atomic spectroscopy (01-12-2008)“…Sensitive and accurate characterization of films thinner than a few nm used in nanoelectronics represents a challenge for many conventional production…”
Get full text
Journal Article -
16
RC delay mitigation for sub 700 nm hybrid bonding pitch
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Hybrid bonding is one of the most scalable 3D integration methods allowing very high interconnect density. The bonding pitch reduction leads to an increase in…”
Get full text
Conference Proceeding -
17
Sub 1\ \mu \mathrm Pitch Achievement for Cu/SiO2 Hybrid Bonding
Published in 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) (07-12-2022)“…With hybrid bonding pitch reduction, many challenges are arising especially the ones related to Cu-Cu connections with submicron Cu pads. A methodology is…”
Get full text
Conference Proceeding -
18
Numerical and experimental investigations on the hybrid bonding of Cu/SiÜ2 patterned surfaces using a cohesive model
Published in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01-04-2016)“…Among the numerous ways to process 3D stacking of integrated circuits, a promising method is the use of Cu/SiO 2 hybrid bonding, which enables simultaneous…”
Get full text
Conference Proceeding -
19
Mass Transport-Induced Failure of Hybrid Bonding-Based Integration for Advanced Image Sensor Applications
Published in 2016 IEEE 66th Electronic Components and Technology Conference (ECTC) (01-05-2016)“…This paper presents, for the first time, an electromigration study for a hybrid bonding-based integration for advanced image sensor applications. This work…”
Get full text
Conference Proceeding -
20
Impact of integrating microchannel cooling within 3D microelectronic packages for portable applications
Published in 2013 Eurpoean Microelectronics Packaging Conference (EMPC) (01-09-2013)“…This work presents the impact of integrating microfluidic channels at different locations in a 3D stacked chip configuration to improve its thermal management…”
Get full text
Conference Proceeding