Search Results - "Lescaut, B."
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SiON large area deposition with a deep-UV flash argon/krypton lamp array
Published in Applied surface science (1996)“…Silicon oxynitride, SiO x N y ( x, y ∼), grown by flash deep-ultraviolet chemical vapor deposition (FUV CVD) has attractive optical, electrical, mechanical and…”
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Journal Article Conference Proceeding -
2
Passivation of InP-based HBTs for high bit rate circuit applications
Published in Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials (1997)“…We have studied different materials (silicon nitride, silicon oxide, polyimide) for passivating InP-based HBTs, and their influence on the device electrical…”
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Conference Proceeding -
3
Cubic phase gallium nitride epitaxially formed on GaAs or GaInAs at low temperature with a NH3 DECR plasma
Published in Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials (1997)“…GaN is a compound semiconductor attractive for its blue band gap (3.45 eV) and its large saturated electron drift velocity. Unfortunately, because of its large…”
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Conference Proceeding -
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Passivation of InGaAs surfaces with an integrated process including an ammonia DECR plasma
Published in Proceedings of 8th International Conference on Indium Phosphide and Related Materials (1996)“…Stable and optimum characteristics of micro-optoelectronic devices and circuits require the passivation of the free surface of the III-V materials. An…”
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Conference Proceeding