Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterp...

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Bibliographic Details
Published in:Nature communications Vol. 13; no. 1; p. 3220
Main Authors: Huber, R., Kern, F., Karnaushenko, D. D., Eisner, E., Lepucki, P., Thampi, A., Mirhajivarzaneh, A., Becker, C., Kang, T., Baunack, S., Büchner, B., Karnaushenko, D., Schmidt, O. G., Lubk, A.
Format: Journal Article
Language:English
Published: London Nature Publishing Group UK 09-06-2022
Nature Publishing Group
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Subjects:
142/126
147/28
639/166/987
639/624/400/1113
639/766/930/328/2082
639/925/927/1062
639/925/930/1032
Charged particles
Coils
Electron beams
Humanities and Social Sciences
Magnetic fields
Magnetic lenses
Micro-optics
Microscopes
multidisciplinary
Optical instruments
Optics
Particle beams
Science
Science (multidisciplinary)
Self-assembly
Wave fronts
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Summary:Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterparts. However, electromagnets are typically macroscopic (super-)conducting coils, which cannot generate swiftly changing magnetic fields, require active cooling, and are structurally bulky, making them unsuitable for fast beam manipulation, multibeam instruments, and miniaturized applications. Here, we present an on-chip microsized magnetic charged particle optics realized via a self-assembling micro-origami process. These micro-electromagnets can generate alternating magnetic fields of about ±100 mT up to a hundred MHz, supplying sufficiently large optical power for a large number of charged particle optics applications. That particular includes fast spatiotemporal electron beam modulation such as electron beam deflection, focusing, and wave front shaping as required for stroboscopic imaging. Electron beam manipulation is important for their application in microscopes, lithography instruments, and colliders. Here the authors report a wafer scale, self-assembled, microcoil electrically-driven magnetic charge particle optic device that can be implemented into different configurations for controlling of electron beams.
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ISSN:2041-1723
2041-1723
DOI:10.1038/s41467-022-30703-y