Search Results - "Leksakul, K."
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Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films
Published in Surface & coatings technology (25-12-2015)“…Al doped ZnO films are prepared in dual-confined plasmas (rectangular side-ways and one top-side) in DC magnetron sputtering system without intentional…”
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Journal Article -
2
Low temperature, high conductivity Al-doped ZnO film fabrication using modified facing target sputtering
Published in Thin solid films (31-07-2015)“…Al-doped ZnO films were deposited and characterized for a transparent electrode. To synthesize low temperature and low resistivity films using stronger plasma…”
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Journal Article -
3
SiCxHy-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures
Published in Current applied physics (01-11-2015)“…This work investigates on chemical and mechanical resistance of hydrophobic films; prepared using radio frequency (RF) plasma enhanced chemical vapor…”
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Journal Article -
4
Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO2 film
Published in Materials today : proceedings (2017)“…Hydroxyapatite (HA) and Titanium (Ti) thin film was fabricated by a pulsed DC magnetron sputtering technique. To synthesize a thin film that compatible with…”
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Journal Article -
5
Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO 2 film
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Journal Article -
6
Patterning of burnishing head using SU-8 hard mask fabricated by deep X-ray lithography
Published in 2012 9th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (01-05-2012)“…This paper studies on the application of X-ray irradiation from synchrotron light for burnishing head patterning. Feasibility study of SU-8 negative…”
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Conference Proceeding -
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Predictive performance model in collaborative supply chain using decision tree and clustering technique
Published in 2011 4th International Conference on Logistics (01-05-2011)“…This paper proposes an integrated framework between B2B supply chains (B2B-SC) and performance evaluation systems. This framework is based on data mining…”
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Conference Proceeding -
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Wall angle control of reactive ion etched features on a silicon substrate
Published in 2010 3rd International Nanoelectronics Conference (INEC) (01-01-2010)“…This paper investigated the ability of the etched wall angle controllable. We used silicon with a patterned wet film photo resistance as a base substrate. A…”
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Conference Proceeding