Search Results - "Lehnen, Peer"
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High-density MIM capacitors with HfO2 dielectrics
Published in Thin solid films (22-12-2004)“…Metal--insulator--metal (MIM) capacitors with high--k HfO2 dielectrics were fabricated and investigated. Experimental results show low leakage current…”
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Journal Article -
2
The characteristics of hole trapping in HfO2∕SiO2 gate dielectrics with TiN gate electrode
Published in Applied physics letters (18-10-2004)“…The characteristics of charge trapping during constant voltage stress in an n-type metal–oxide–semiconductor capacitor with HfO2∕SiO2 gate stack and TiN gate…”
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Journal Article -
3
Improved reliability of HfO2/SiON gate stack by fluorine incorporation
Published in IEEE electron device letters (01-04-2006)Get full text
Journal Article -
4
High-density MIM capacitors with HfO 2 dielectrics
Published in Thin solid films (2004)“…Metal–insulator–metal (MIM) capacitors with high- k HfO 2 dielectrics were fabricated and investigated. Experimental results show low leakage current densities…”
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Journal Article -
5
High-performance Pt/SrBi2Ta2O9/HfO2/Si structure for nondestructive readout memory
Published in IEEE electron device letters (01-09-2003)Get full text
Journal Article -
6
HfO2 MIS capacitor with copper gate electrode
Published in IEEE electron device letters (01-12-2004)Get full text
Journal Article -
7
Improvements on Electrical Characteristics of p-Channel Metal–Oxide–Semiconductor Field Effect Transistors with HfO 2 Gate Stacks by Post Deposition N 2 O Plasma Treatment
Published in Japanese Journal of Applied Physics (01-11-2005)“…In this work, we found that employing a post deposition N 2 O plasma treatment following the deposition of HfO 2 film can effectively improve the electrical…”
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Journal Article -
8
Electrical Characteristics of Thin HfO 2 Gate Dielectrics Prepared Using Different Pre-Deposition Surface Treatments
Published in Japanese Journal of Applied Physics (01-01-2005)“…We have investigated the effects that various pre-deposition surface treatments, such as HF dipping (HF-dipped), NH 3 surface nitridation (NH 3 -annealed), and…”
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Journal Article -
9
Anomalous positive-bias temperature instability of high-κ/metal gate nMOSFET devices with Dy2O3 capping
Published in 2008 IEEE International Reliability Physics Symposium (01-04-2008)“…Recently, thin rare-earth oxide dielectric capping layers between the high-k and metal gate have been used to modulate the threshold voltage (Vt) of MOSFETs…”
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Conference Proceeding -
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High-density MIM capacitors with HfO2 dielectrics
Published in Thin solid films (2004)Get full text
Conference Proceeding