Search Results - "Lee, Woobeen"

A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge by Seong, Inho, Kim, Sijun, Lee, Woobeen, Lee, Youngseok, Cho, Chulhee, Jeong, Wonnyoung, Choi, Minsu, Choi, Byeongyeop, Seo, Huichan, Song, Sangheon, You, Shinjae

“…A global model (GM) assumes ion energy ( ε ) on the electrode equals the time-averaged sheath voltage ( V sh t t ). However, using particle-in-cell simulation,…”
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Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma by Seong, Inho, Kim, Sijun, Choi, Minsu, Lee, Woobeen, Jeong, Wonnyoung, Cho, Chulhee, You, Yebin, Lee, Youngseok, Seol, Youbin, You, Shinjae

“…The understanding of ion dynamics in plasma applications has received significant attention. In this study, we examined these effects between He and Ar…”
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