Search Results - "Lecouvreur, Paul"
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Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)“…Dense hydrogenated silicon nitride (SiNx:H) layers for photovoltaics are made by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition (AP‐PECVD). The…”
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Hydrogenated Silicon Nitride SiN x :H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)Get full text
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Hydrogenated Silicon Nitride SiN sub(x):H Deposited by Dielectric Barrier Discharge for Photovoltaics
Published in Plasma processes and polymers (01-01-2016)“…Dense hydrogenated silicon nitride (SiN sub(x):H) layers for photovoltaics are made by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition…”
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Journal Article