Search Results - "Lawson, Ron P"

Gas mixture analysis and vacuum measurement using a CMOS micromachined optical Pirani gauge by Ma, Yuan, Robinson, Alexander M, Lawson, Ron P, Allegretto, Walter, Vermeulen, Fred, Brown, Keith B

“…The paper reports on the design, fabrication, and testing of a CMOS-compatible micromachined radiator for implementation as both a high-sensitivity vacuum…”
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Measuring the deflection of CMOS micromachined cantilever devices using a piezoresistive sensor by Ma, Yuan, Robinson, Alexander M, Allegretto, Walter, Zhou Tiansheng, Brown, Keith B, Strembicke, Derek

“…Polysilicon piezoresistors have been integrated and tested in micromachined cantilever-in-cantilever devices for detecting deflection using the polycrystalline…”
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Pressure measurement using hysteresis effects in cantilever microstructures by Ma Y, Lawson, Ron P, Brown, K B, Garcia, A, Vermeulen, F E, Robinson, A M, Allegretto, W

“…Hysteresis effects are observed as the resonance characteristics of an oscillating microcantilever are modified by changes in ambient air pressure. These…”
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