Search Results - "Landesberger, Christof"
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Six-layer lamination of a new dry film negative-tone photoresist for fabricating complex 3D microfluidic devices
Published in Microfluidics and nanofluidics (01-03-2017)“…We present a new epoxy-based negative-tone dry film photoresist (DFR) for fabricating multilayer microfluidic devices using a lamination process combined with…”
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Journal Article -
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Analysis of wafer bonding by infrared transmission
Published in Japanese Journal of Applied Physics (01-07-1996)“…In solid state technology, two silicon wafers can be combined by wafer bonding. Small particles between the two surfaces may cause voids. For quality control,…”
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Journal Article -
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Low Profile Open MEMS and ASIC Packages manufactured by Flexible Hybrid Integration in a Roll-to-Roll compatible process
Published in 2018 48th European Solid-State Device Research Conference (ESSDERC) (01-09-2018)“…Here we report on a flexible, foil based packaging process in which a standard commercially available MEMS capacitive air pressure sensor is packaged in an…”
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Conference Proceeding -
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Investigations of the influence of dicing techniques on the strength properties of thin silicon
Published in Microelectronics and reliability (01-02-2007)“…Thin silicon offers a variety of new possibilities in microelectronical, solar and micromechanical industries, e.g. for 3D-integration (stacked dies), thin…”
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Journal Article Conference Proceeding -
5
Roll-to-roll hot embossing of microstructures
Published in Microsystem technologies (01-04-2011)“…In this paper we present a new roll-to-roll embossing process allowing the replication of micro patterns with feature sizes down to 0.5 μm. The embossing…”
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Journal Article Conference Proceeding -
6
Selective one-step plasma patterning process for fluidic self-assembly of silicon chips
Published in 2008 58th Electronic Components and Technology Conference (01-05-2008)“…Applying a tetrafluoromethane (CF 4 ) low pressure plasma process to the surface of a polymeric foil with a structured thin film copper layer on top results in…”
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Conference Proceeding -
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Biomolecular self-assembly of micrometer sized silica beads on patterned glass substrates
Published in Applied surface science (15-06-2009)“…A self-assembly process for the two-dimensional arrangement of micrometer sized silica beads on glass slides was developed. It is based on the hybridization of…”
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Advanced integration technology for fabricating high-speed electro-optical sub-assembly
Published in 2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC) (13-09-2021)“…Here, we report flip-chip bonding processes based on Anisotropic Conductive Film (ACF) and Sn-Ag-Cu (SAC) solder implemented for bonding three test chips (two…”
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Conference Proceeding -
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Investigations of the fracture strength of thin silicon dies embedded in flexible foil substrates
Published in 2014 IEEE 20th International Symposium for Design and Technology in Electronic Packaging (SIITME) (01-10-2014)“…Mechanical stress induced by mechanical and thermal loading on thin silicon devices breaks the devices at a certain load called the fracture or breaking…”
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Conference Proceeding -
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Fraunhofer's Initial and Ongoing Contributions in 3D IC Integration
Published in 2019 International 3D Systems Integration Conference (3DIC) (01-10-2019)“…Pioneering contributions of Fraunhofer in the field of 3D IC integration are presented, as well as recent 3D design and technology developments with a…”
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Conference Proceeding -
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Finite element analysis of uniaxial bending of ultra-thin silicon dies embedded in flexible foil substrates
Published in 2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01-06-2015)“…We report a Finite Element Model to calculate the bending stress of thin and ultra-thin silicon dies embedded in flexible foil substrates (chip-in-foil…”
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Conference Proceeding -
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Electrical behaviour of Flip-Chip bonded thin silicon chip-on-foil assembly during bending
Published in 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging (SIITME) (01-10-2015)“…We present our results on the analysis of electrical performance of Flip-Chip bonded thin Silicon chip-on-foil assemblies during bending. A custom made bending…”
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Conference Proceeding -
13
Plasma dicing enables high accuracy self-alignment of thin silicon dies for 3D-device-integration
Published in 2012 4th Electronic System-Integration Technology Conference (01-09-2012)“…Thin silicon chips with a thickness of 50 μm are of light weight and are able to swim on droplets of fluids like for instance water. If the liquid shows a…”
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Conference Proceeding -
14
Broadband interconnect design for silicon-based system-in-package applications up to 170 GHz
Published in 2013 European Microwave Conference (01-10-2013)“…This paper presents the design of vertical chip-to-chip interconnects for mm-wave system-in-package (SiP) applications up to 170 GHz. Solid and liquid type…”
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Conference Proceeding -
15
Roll-to-roll hot embossing of microstructures
Published in 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) (01-05-2010)“…In this paper we present a new roll-to-roll embossing process allowing the replication of micro patterns with feature sizes down to 0.5 μm. The embossing…”
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Conference Proceeding -
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Polymer opto-electronic-fluidic detection module on plastic film substrates
Published in 2011 IEEE 61st Electronic Components and Technology Conference (ECTC) (01-05-2011)“…This paper presents a multi-functional operational diagnostic lab-on-foil analysis system integrating electrical and optical devices by polytronic means. This…”
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Conference Proceeding -
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Investigations of strength properties of ultra-thin silicon
Published in EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005 (2005)“…Thin silicon offers a variety of new possibilities in microelectronical and micromechanical industries, e.g. for 3D-integration (stacked dice) or…”
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Conference Proceeding -
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Chip-in-polymer: volumetric packaging solution using PCB technology
Published in 27th Annual IEEE/SEMI International Electronics Manufacturing Technology Symposium (2002)“…The new challenge is to incorporate not only passive components, but as well active circuitry (ICs) and the necessary thermal management. Ultra thin chips…”
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Conference Proceeding