Search Results - "Laboriante, I."
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Compositional dependence of the microscopic frictional properties of single crystal metal carbides
Published in Tribology letters (01-09-2006)“…The frictional properties of TiC(100), Ti0.3V0.6C(100), and VC(100) surfaces in contact with a silicon nitride probe tip have been investigated by atomic force…”
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Journal Article -
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Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2011)“…The surfaces of a microfabricated polysilicon test structure, designed to measure adhesion forces in MEMS, were modified with a thin (~50 nm) silicon carbide…”
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Conference Proceeding -
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2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2009)“…Growing interest in assessing the reliability of microelectromechanical systems has created a need for the development of microinstruments to interrogate MEMS…”
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Conference Proceeding