Search Results - "Kwa, T.A."
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Backside-illuminated silicon photodiode array for an integrated spectrometer
Published in IEEE transactions on electron devices (01-05-1997)“…A p/sup +/-n, backside-illuminated photodiode array, to be used in an integrated silicon spectrometer, has been fabricated and characterized. For this type of…”
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Journal Article -
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Electronically controlled etch-mask for silicon bulk micromachining
Published in Journal of microelectromechanical systems (01-12-1994)“…Wafers that are to be submitted to anisotropic etching in aqueous KOH are conventionally passivated with a silicon dioxide or nitride layer in which backside…”
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Journal Article -
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An integrated high-resolution optical angular displacement sensor
Published in TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (1991)“…The sensor consists of a rotating element with reflective patterns fabricated onto it and a stationary part with optical detectors and readout circuitry,…”
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Conference Proceeding
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Integrated monochromator fabricated in silicon using micromachining techniques
Published in TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (1991)“…Silicon bulk micromachining techniques have been employed to fabricate a fully integrated grating monochromator in silicon for operation in the visible and…”
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Conference Proceeding