Fabrication of a true-Gaussian-shaped quartz crystal resonator

•Fabrication process of a true-Gaussian-shaped quartz crystal resonator was developed using photolithographic methods.•The shape was carefully adjusted by changing the surface tension of the photoresist.•Gaussian-shaped resonator has superior resonance characteristic. In this paper, a simple fabrica...

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Bibliographic Details
Published in:	Sensors and actuators. A. Physical. Vol. 260; pp. 58 - 61
Main Authors:	Kutsuwada, Hiroki, Watanabe, Sho, Sohgawa, Masayuki, Abe, Takashi
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 15-06-2017
Subjects:	3D fabrication Gaussian shape Quartz crystal resonator Gaussian shape 3D fabrication Quartz crystal resonator
Online Access:	Get full text
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Summary:	•Fabrication process of a true-Gaussian-shaped quartz crystal resonator was developed using photolithographic methods.•The shape was carefully adjusted by changing the surface tension of the photoresist.•Gaussian-shaped resonator has superior resonance characteristic. In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching.
ISSN:	0924-4247 1873-3069
DOI:	10.1016/j.sna.2017.04.019