Search Results - "Kumar, Mishra Dileep"
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Fabrication of Through-glass Vias (TGV) based 3D microstructures in glass substrate by a lithography-free process for MEMS applications
Published in Applied surface science (15-05-2022)“…[Display omitted] •Fabrication of 3D microstructures in glass by lithography-free approach for RF MEMS.•Direct formation of through-holes and embedded…”
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Multi-Response Optimization during Electro-Discharge Machining of Super Alloy Inconel 718: Application of PCA-TOPSIS
Published in Materials today : proceedings (2018)“…The present work aims to determine an appropriate setting of process parameters (viz. gap voltage, peak discharge current, pulse-on time, duty factor and…”
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3
Fabrication of 3D microstructures in glass by direct writing electrochemical discharge machining
Published in Materials and manufacturing processes (11-06-2023)“…The formation of 3D copper-filled microstructures in glass using direct writing electrochemical discharge machining (ECDM) and electrodeposition techniques is…”
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Experimental investigation into tool wear behaviour of line-array tool electrode during the electrochemical discharge micromilling process
Published in Journal of manufacturing processes (01-12-2021)“…A tool-workpiece gap during the electrochemical discharge machining (ECDM) process is a critical parameter for successfully fabricating microchannels using…”
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Measurement and analysis of the geometric characteristics of microholes and tool wear for varying tool-workpiece gaps in electrochemical discharge drilling
Published in Measurement : journal of the International Measurement Confederation (15-01-2021)“…•The effect of the T-W gap on the microholes formation by the ECDD is reported.•A T-W gap of 10–30 µm for NaOH and 5–20 µm for KOH electrolyte must be…”
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Cu Damascene Process on Temporary Bonded Wafers for Thin Chip Stacking using Cu-Cu Hybrid Bonding
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01-05-2023)“…Hybrid bonding is one of the innovative permanent bonding technologies that form dielectric-dielectric and metal-metal bonds, respectively. Hybrid bonding is…”
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Conference Proceeding -
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Cathode shape prediction for uniform electrochemical dissolution of array tools for ECDM applications
Published in Materials and manufacturing processes (10-09-2022)“…The effect of various cathode shapes, i.e., flat-plate, conical, and spherical-shaped cathodes, on the electrochemical dissolution (ECD) behavior of the 3 × 3…”
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Multi-Chip Stacked Memory Module Development using Chip to Wafer (C2W) Hybrid Bonding for Heterogeneous Integration Applications
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…The present study focuses on multi-chip stacked memory module development, and it encompasses a comprehensive overview of critical aspects, key learnings,…”
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Conference Proceeding -
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Process Challenges in Thin Wafers Fabrication with Double Side Hybrid Bond Pads for Chip Stacking
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…3D packaging with stacked dies is widely explored as a future advanced packaging technology for applications involving high-performance computing and High…”
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Conference Proceeding -
10
Fabrication of multiple through-holes in non-conductive materials by Electrochemical Discharge Machining for RF MEMS Packaging
Published in Journal of materials processing technology (01-09-2019)“…Formation of multiple through-holes arrays in a 400 μm thick silica substrate is reported for the first time by a cost-effective electrochemical discharge…”
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11
Reliability Assessment of 2.5D Module using Chip to Wafer Hybrid Bonding
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Wafer to wafer hybrid bonding has been established to form fine pitch interconnections for high density I/O applications [1], [2]. However, this approach has…”
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Conference Proceeding -
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Evaluation of Low Temperature Inorganic Dielectric Materials for Hybrid Bonding Applications
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…High-bandwidth memory (HBM) market is witnessing huge demand for high performance computing. Vertical/3D stacking of memory chips using hybrid bonding is a…”
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Conference Proceeding -
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Polymer Dielectric Materials Evaluation for Hybrid Bonding Applications
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Hybrid bonding is an emerging technology for advanced packaging and heterogeneous integration. In this work, Cu/polymer-based hybrid bonding is being evaluated…”
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Conference Proceeding -
14
Effect of pulse frequency and duty cycle on electrochemical dissolution behavior of multi-tip array tool electrode for reusability in the ECDM process
Published in Journal of applied electrochemistry (01-04-2022)“…This article presents an experimental investigation to obtain the uniform tool tips of the worn tools’ after the electrochemical discharge machining (ECDM)…”
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15
Dielectric Stack Optimization for Die-level Warpage Reduction for Chip-to-Wafer Hybrid Bonding
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28-05-2024)“…Chip-to-wafer hybrid bonding is a promising packaging technology for bumpless and high-density interconnection. However, this approach presents numerous…”
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Conference Proceeding -
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Effects of Tool Electrode on EDM Performance of Ti-6Al-4V
Published in SILICON (01-09-2018)“…Due to widespread application of Ti-6Al-4V especially in automotive, aerospace, defense, and biomedical industries; machinability of this alloy is of immense…”
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Process Development and Integration on Si Substrate for Ion trap-based Quantum Processors
Published in 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC) (05-12-2023)“…Si substrates provide flexible platform for quantum application that can integrate photonic components, active devices, and metal electrodes. Photonics…”
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Conference Proceeding -
18
Investigations into surface topography of glass microfeatures formed by pulsed electrochemical discharge milling for microsystem applications
Published in Microsystem technologies : sensors, actuators, systems integration (01-06-2020)“…Experimental investigations into the effect of duty cycle and electrolyte concentration on the surface topography in the microchannel formation in the…”
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19
Numerical and experimental analysis of high-aspect-ratio micro-tool electrode fabrication using controlled electrochemical machining
Published in Journal of applied electrochemistry (01-02-2020)“…Numerical and experimental analysis of high-aspect-ratio micro-tool electrodes fabrication using a controlled electrochemical machining (ECM) technique is…”
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20
Etching of micro-channels in fused quartz for novel device applications
Published in Materials today : proceedings (01-08-2023)Get full text
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